4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

HRX-OM-W004

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 16. Press the [] key.

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

HRX-OM-W002

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

VS 8-2/VS 8-4

8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Compact Vacuum Unit

With lead wire with connector (Lead wire length: 78.7 inch (2 m)) 0.0 to 14.6 psi (0.0 to 101.0 kPa) 14.5 to 14.5 psi (100.0 to 100 kPa) G E KJ C1 H 04 F Body type Port size H L 02 04 01 03 2 mm one-touch fitting 4 mm one-touch fitting 1/8" one-touch fitting 5/32" one-touch fitting Straight Elbow Metric size Inch size Output specifications A B NPN open collector 2 outputs PNP open collector

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Modular Type Air Filters Series AF

Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

20

Material Applicable blow gun model Model Male thread nozzle 1 to 2.5 Male thread nozzle 3 to 4 Width across flats 17 Nozzle type P5670129-01 P5670129-01F P5670129-02 P5670129-02F HNBR Fluororubber HNBR Fluororubber VMG1mm-m-01 to 04 VMG1mm-m-05 to 07 m25 VMG1m-mm-1 to 04 Width across flats 17 m23.5 VMG1m-mm-05 to 07 Cover for copper extension nozzle (mm) Nozzle cover part no.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

20

Material Applicable blow gun model Model Male thread nozzle 1 to 2.5 Male thread nozzle 3 to 4 Width across flats 17 Nozzle type P5670129-01 P5670129-01F P5670129-02 P5670129-02F HNBR Fluororubber HNBR Fluororubber VMG1--01 to 04 VMG1--05 to 07 25 VMG1--1 to 04 Width across flats 17 23.5 VMG1--05 to 07 Cover for copper extension nozzle [mm] Nozzle cover part no.

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Speed Controller with One-touch Fittings

AS2002F-04-X12 Applicable tubing O.D. Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)