Modular F.R.L. Units

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR30(K)-B AR40(K)-B AR40(K)-06-B 0.25 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point Set point 0.2 0.2 0.2 0.15 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet

Electric Slide Tables

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

Stainless Steel 316

(mm) Model 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 Male Elbow Male Elbow Bulkhead Union Bulkhead Union Applicable tubing O.D. (mm) Connection thread Model Applicable tubing O.D.

Vacuum Unit

B 78.8 Hexagon width across flats C E1 2 x 4.5 Mounting hole Air pressure supply (PV) port 4 19.4 27.5 (58.2) 45.9 8.4 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 16.5 38.5 3 15 Suction filter 3.5 78.8 A V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 3 Refer to page 38 for dimensions with a mounting bracket.

Speed Controller with Indicator

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Modular Type Regulator Series AR

MPa 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa AR30 AR60 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 38 AR10 to 60 Construction AR10 AR20, 25 t t

VQ5000

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

SL5200

-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289 00-83000290 00-83000291 00-83000292 00-83000286 00-83000285 00-83000284 00-83000283 00-83000282 NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) Connections Temperature range 25% to 75% of the scale: 2%F.S.

AZ1000

-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289 00-83000290 00-83000291 00-83000292 00-83000286 00-83000285 00-83000284 00-83000283 00-83000282 NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) Connections Temperature range 25% to 75% of the scale: 2%F.S.

BP1000

-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289 00-83000290 00-83000291 00-83000292 00-83000286 00-83000285 00-83000284 00-83000283 00-83000282 NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) Connections Temperature range 25% to 75% of the scale: 2%F.S.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

LVQ

PB B A B A B A N.C. N.O. Double acting Double acting N.O. Double acting With flow rate adjustment PA N.C. B A N.C. Inch sizes 07 11 13 19 25 Double acting 1/4 3/8 1/2 3/4 1 With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA N.C. B A N.C. High back pressure PA N.C. B A N.C.

Series AP500

-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289 00-83000290 00-83000291 00-83000292 00-83000286 00-83000285 00-83000284 00-83000283 00-83000282 NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) Connections Temperature range 25% to 75% of the scale: 2%F.S.

VVX31/32/33

Allowable voltage fluctuation is 10% of the rated voltage. 3 VX3235-00 0.3 370 0.33 7.9 0.6 530 VX3335-00 VX3245-00 0.15 370 0.5 12 4 VX3345-00 0.3 530 Model/Valve Specifications (Fluids: Air, Vacuum, Inert gas) Max. operating pressure differential (MPa) Flow characteristics Air b Cv C [dm3/(sbar)] Max. system pressure (MPa) Orifice size (mm) Weight (g) Model AC/DC C.O. 1.5 0.6 0.3 0.6

SYJ300/500/700

Enclosure Based on IEC60529 Note 1) Based on dynamic performance test, JIS B 8375-1981.

Modular Type Regulators Series AR

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.