Vacuum Saving Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

α PneuAlpha HARDWARE MANUAL

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480

VCB

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

CEx-OMQ0010

/ 5-4 (1)CEU1CEU2CEU5 CE1-R**, 17 (2) (3)SFC-10 (4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)(

Air Cylinder Series MB

d Dd9 D C L l m H B Note 1) d (Through hole diameter) Bore size (mm) Clevis Knuckle Part No.

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

ITV

Linearity within 1% (Full span) Hysteresis 0.5% (Full span) Repeatability 0.5% (Full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or less) High-speed response time 0.1sec Air Filter (5 m or less) IR (Precision regulator) W (Without load) 14-8-2 3 Compact Electro-pneumatic Regulator Series ITV0 How to Order F.R.L.

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Filtration 0.3 m Space-saving and easy piping.

Table of Contents

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.