VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

5 o y i q t u !0 !1 e w r !3 !8 !7 @3 @0 !9 @4 @1 @2 @6 @5 @7 @8 LVM No.

Information

w e r t q w e r t i i o o !

HRX-OM-X027

AC200-230V 50/60Hz 1Ph 9.6A XQ001(MAR.2019) How to see the manufacturing code X Q 001 March 2019 X Q 001 REFRIGERANT R410A(HFC) 0.39kg Year Symbol Remarks Month Symbol Remarks Serial (GWP:2088) no.

Return Filter FH100 Series

Precautions FH100-06 to 24: Nominal filtration 10 m q Mounting Confirm IN and OUT before mounting.

Vacuum Module Series ZX

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Micro Mist Separator Series AFD20/30/40

Please contact SMC if an application under such conditions cannot be avoided. 10 One-touch fitting 10 One-touch fitting Component Parts Material AFD20 Zinc die-casted AFD30, AFD40, AFD40-06 Aluminum die-casted Note Description No. Platinum silver Body q Replacement Parts Part no. No.

Mist Separator Series AFM20/30/40

Component Parts Material AFM20 Zinc die-casted AFM30, AFM40, AFM40-06 Aluminum die-casted Note Description No. Platinum silver Body q Replacement Parts Part no. No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

C95

6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

ALF400 to 900, ALT-5/-9

Description Material Note ALF400,400-06 ALF500/600 ALF800/900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted q w Platinum silver painted Replacement Parts No. Description Material Part no.

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

Vacuum Unit Ejector / Vacuum Pump System

KJH 06 C2 Port size 06 6 One-touch fitting (Straight) Metric size 07 1/4 One-touch fitting (Straight) Inch size -33No. ZK2-OM01301 (8) Sound absorbing material (10 pcs. per set) ZK2-SE1-1-A Sound absorbing material hole diameter 1 300m (9) Vacuum port adapter assembly (Purchasing order is available in units of 1 piece.)

AMR3000 to 6000

Switch assembly Adjusting screw Working principle When the MR units OUT side pressure is applied to piston q, piston q moves until it balances with the force of pressure adjustment spring w. The movement of piston q is detected by switch assembly e and outputs ON and OFF signals. The set pressure can be adjusted by turning adjustment screw r, which adjusts the spring force.