Ionizer Nozzle type IZN10 Series IZS

can be used with the manifold. 20 m 20 Repair Parts Emitter assembly/IZN10-NT Emitter assembly Body assembly: IZN10-A00201 06 Nozzle type Port size 6 : Metric size 06 Type Symbol 01 02 11 6.35 (1/4") : Inch size 07 Energy saving static neutralization nozzle 6 : Metric size (Elbow) 16 High flow rate nozzle 6.35 (1/4") : Inch size (Elbow) 17 Female threads for piping Rc1/8 Cartridge assembly

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

A_HEC-OM-J017

32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Soft Start-up Valve AV2000/3000/4000/5000

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

KDM

No. of connection tubes Plug Model Color of release button D Socket KDM10S-23 KDM10S-04 KDM10S-06 KDM10S-08 KDM20S-23 KDM20S-04 KDM20S-06 KDM20S-08 KDM10P-23 KDM10P-04 KDM10P-06 KDM10P-08 KDM20P-23 KDM20P-04 KDM20P-06 KDM20P-08 3.2 4 6 MS Irregular faces for engagement 10 Allen wrench (Nominal width across flats 4) T 8 3.2 Blue VMG 4 6 8 20 Clamp bolt Panel mounting 1.

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

. current command) 05 Speed command (8 V/max. speed) 06 Servo motor-side droop pulses (10 V/100 pulses) (Note 1) 07 Servo motor-side droop pulses (10 V/1000 pulses) (Note 1) 08 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 09 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 0A Feedback position (10 V/1 Mpulses) (Note 1) 0B Feedback position (10 V/10 Mpulses) (Note 1) 0C Feedback