5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

voltage suppressor (External pilot port) Electrical entry Pilot EXH port ( ): Rc 1 8 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 Manual override (Non-locking) 2 x 5 mounting hole 150.5 (3 position: 158) 2 x 5 mounting hole Manual

VFS

EXH port M5 x 0.8 EVS 1 8 ( ): Rc VFN 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor

Modular F.R.L. Unit

/2 3/4 1/4, 3/8 Port size How to Order How to Order AW 30 BG X430 03 AW 30 BG X425 03 Body size For high pressure Body size For high/low temperature 20 30 40 1/8 3/8 1/2 30 40 3/8 1/2 X430 X440 Low temperature High temperature Port size Option Port size Option 02 03 04 06 1/4 3/8 1/2 3/4 01 02 03 04 06 Description With bracket 1/8 1/4 3/8 1/2 3/4 Symbol Nil B G Note) Description With bracket

Table of Contents

8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43

Best Pneumatics Vol. 14

) 20 30 40 01 02 03 04 1/8 1/4 3/8 2/1 Note 3) Optional parts are not assembled and are supplied loose at the time of shipment (except options C, D and E).

Modular F.R.L. Unit

(The SI unit type is provided for use in Japan.) 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 Option Note 3) Symbol Description Applicable model Nil B With bracket AW20(K) to 40(K) C Float type auto drain (N.C.)

VZS

position double: VZS2250-L(Z)-01 3 position closed center: VZS2350-L(Z)-01 3 position exhaust center: VZS2450-L(Z)-01 3 position pressure center: VZS2550-L(Z)-01 K plug connector 2 position double: VZS2250-KZ-01 3 position closed center: VZS2350-KZ-01 3 position exhaust center: VZS2450-KZ-01 3 position pressure center: VZS2550-KZ-01 EVS VFN 132 (3 position: 142) (Lead wire length) 300 (Lead

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

1.6 P R2 R1 27.2 1/8 (P, R1, R2 port) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ7 23-L-01 3 4 5 M plug connector (M): 10-SYJ7 23-M-01 3 4 5 DIN terminal (D, Y): 10-SYJ7 23-D Y-01 3 4 5 M8 connector (WO): 10-SYJ7 23-WO-01 3 4 5 Approx. 300 (Lead wire length) 65 Max. 10 31.5 [38.5] 57.5 16.1 46.2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 60 or less 5 1.87 (1.82) Closed center VFR530 VFR531 80 or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

EXxx-OMO0027

80xA:0 Slot x: Filter USINT 2 0=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 4 0=010 V 1=05 V 2=15 V 3=020 mA 4=420 mA 80xB:01 Channel 0 / Analogue range Enum0805 : x: Slot No. : Channel 0 and 1 indicate analogue input, and Channel 2 and 3 indicate analogue

SYJ300/500/700

82-3-05 12 VDC 12VN SY100-82-3-06 100 VAC 100VN SY100-82-3-01 200 VAC 200VN SY100-82-3-02 110 [115] VAC 110VN SY100-82-3-03 220 [230] VAC 220VN SY100-82-3-04 Rated voltage DC 5 24 VDC 6 12 VDC Light/surge voltage suppressor Nil Without light/surge voltage suppressor S Z With surge voltage suppressor With light/surge voltage suppressor 50 60 AC ( Hz) 1 100 VAC 2 200 VAC Caution "YOZ" is not

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR 50-01-A18 75-01-A18 289 147 ZCUK 75-01-A18 ZPT100HBNJ25-01-A22 535 168 40 50 63 80 100 125 1 0 ZPT50HBNJ25-01-A18 50-01-A22 575 143 AMJ 2 0 50-01-A18 75-01-A22 620 163 3 0 75-01-A18 100-01-A22 659 201 AMV 6 0 ZPT63HBNJ25-01-A18 ZPT125HBNJ25-01-A22 719 208 12 1 50-01-A18 50-01-A22 228 759 AEP 22 3 75-01-A18 75-01-A22 249 804 ZPT80HBNJ25-01-A18

SY

4 5 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 (37) With plug (12.5) 41 3 4 5 L type plug connector (L): SY3 40(R)-L-01 M type plug connector (M): SY3 40(R)-M-01 3 4 5 Manifold spec. sheets Order made Type 45 Type 45Grommet .

13

8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43

5 Port Air Operated Valve Series SYA3000/5000/7000 1

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

OMU0023

Step Request data Response data Operation details 1 01 0F 0010 000B 02 0 01 0F 0010 000B Instruction to turn Card Motor power OFF sent. 2 01 05 0030 FF00 01 05 0030 FF00 Instruction to change the Card Motor controller operation mode to "serial operation" sent. 3 01 05 0019 FF00 01 05 0019 FF00 Instruction to turn Card Motor power ON sent. 4 01 05 001A FF00 01 05 001A FF00 Instruction to perform

SYJ3000/5000/7000

Local Area: (800) 258-9200-www.stevenengineering.com 36 + 28 18 25 16.1 21 31.5 [38.5] 1.6 P R2 R1 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7 20-L-01 3 4 5 M plug connector (M): SYJ7 20-M-01 3 4 5 DIN terminal (D): SYJ7 20-D-01 3 4 5 M8 connector (WO): SYJ7 20-WO-01 3 4 5 Approx. 300 (Lead wire length) 65 57.5 31.5 [38.5] Max. 10 16.1 46.2 M8 x 1 36 31.1 18.5 42.6

VFR

VS4 Bottom ported: VV5FR4-01 Station 2Port size FD FU External pilot port VQ7 EVS For wiring specifications, refer to page 3-5-8.

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

Fieldbus system EtherCAT compatible SI Unit

01 40xA:04 Channel 0 Channel 3 (Analogue range) Enum080E 1: x = Unit No.