Table of Contents Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.
CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke
68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.
B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E
2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.
2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2) u u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
3 Valve spring Stainless steel 11.5 X 8.5 X 1.5 JIS B2401 P3 28 X 25 X 1.5 14.5 X 10.5 X 2 JIS B2401 P5 35 X 31 X 2 Valve O ring NBR 1 O ring !2 Bracket A 2 O ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hex. socket head cap screw O ring NBR !3 2500 3000 A B How to Order (1) When adding n stations to ARM : Regulator n pcs.
) Width across flat 10 (Hexagon) P Q Q P 5 5 S S 31 8 31 (39) (39) 14.9 14.9 R R 6 6 M5 x 0.8 M5 x 0.8 8 Y Y C A A a a C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R3507W--B5 ZP2-R4010W--B5 ZP2-R5010W--B5 ZP2-R6010W--B5 ZP2-R4020W--B5 ZP2-R5020W--B5 ZP2-R6020W--B5 ZP2-R8020W--B5 2 x 1.5 0.5 0.5 10 11 2.5
Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)
Stations: 2 Stations, Pressure Sensor/Vacuum Pressure Switch Mountable: S (Sensor/Switch Mountable Base), Common Supply, PV Port Size: 01N (NPT1/8), Common Release Pressure, PD Port Size: M5 [M5 x 0.8 (PV≠PD)]
Stations: 2 Stations, Pressure Sensor/Vacuum Pressure Switch Mountable: S (Sensor/Switch Mountable Base), Common Supply, PV Port Size: 01N (NPT1/8)
Stations: 2 Stations, Pressure Sensor/Vacuum Pressure Switch Mountable: Sensor/Switch Non-Mountable Base, Common Supply, PV Port Size: 01N (NPT1/8)
7 @1 q B B !9 B-B !5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.
5 q !9 !8 @7 RE A B REC CX CY MQQ M RHC MK(2) RS Q G @2 !7 @6 #1 #0 @8 !0 @9 !1 @0 #2 i !6 @3 @1 @5 @4 RS H A RZQ MI W S CEP1 REAS10 CE1 Component Parts CE2 Material No. Description Note Material No. Description Note ML2B Stainless steel Cylinder tube q !7 Hard anodized Aluminum alloy Plate B Aluminum alloy External slider tube w !
depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting Nuts: 2 pcs.
MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data
MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data