Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/CLIPS, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02640 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SCREWS, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02471 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SCREWS, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02544 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, STACKING, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02530 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, STACKING, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02689 lb

ZQ-OM01301

ZQ-OM01301-A 2.

Series VCL

. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

IR1000/2000/3000

Precautions. 60 50 50 Rc 1/8 2-Rc 1/4 Pressure gauge port Port size M6 x P0.5 15.5 82 60 IR3120-0 9 Mounting hole 48 2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/

VCL

8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Digital Pressure Switch Series ZSE10(F)/ISE10 How to Order Rated pressure range ISE10 0.100 to 1.000 MPa ISE10 For positive pressure M5 A M For vacuum/ compound pressure ZSE10 M5 B M Option 3 Rated pressure range Symbol Calibration certificate Nil K p ZSE10 ZSE10F 0.0 to 101.0 kPa 100.0 to 100 kPa Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Furthermore, the maximum speed may be restricted depending on the pneumatic circuit or operating pressure. 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

100

2 !3 !

ZQ-OM01401

7 Assy ZQ 1EP2-A 27 - No.ZQ-OM01401-B 8. 8.1 1) 2 2 22 3 0.028~0.032Nm) * 2 1Assy 2 Assy 2Assy () 3Assy 0.25~0.31Nm) 2 Assy () 28 - No.ZQ-OM01401-B 8.2. 1) 2 3) 0.12~0.18Nm) 8.3 1)2 2)2 : 0.054~0.080Nm 2 29 - No.ZQ-OM01401-B 8.4 1)(V)2 2) 2 : 0.11~0.13Nm 3)(V) 2 8.5 1)8.4 Ass'y Ass'y (V) 2)Ass'y 3)8.4 Ass'y 30 - No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6)

ZL3-OM00601

No.ZL3-OM00601-B 2.