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Base material: Aluminum Fluid: Air VXE2 VXED2 VXEZ2 Common SUP Individual SUP u u w w t e t e y r q y r o o q y i y i IN OUT OUT port IN port Base material: Brass (C37), Stainless steel Fluid: Water/Oil Common SUP u w t e y r o q y OUT i IN port Component Parts Material No.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Mechanically Jointed Rodless Cylinders

7 q y @2 @3 !8 !3 @4 r o !1 !

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q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

7.5

0 y t r q e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) Description No. Material Note Component Parts SJ2A60K with back pressure check valve Spool valve assembly 1 N.C. (Normally closed) Resin/H-NBR !0 y t r q e u q !2 i !1 Spool valve assembly 2 Resin/H-NBR N.O.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Ordering example Double solenoid (24 VDC) 10-SZ3260-5LOZ-C6(-Q) (3 sets) SUP/EXH block assembly (U side mounting) Single solenoid (24 VDC) 10-SZ3160-5LOZ-C6(-Q) (2 sets) Manifold base (5 stations) 10-SS5Z3-60S6BD-05U(-Q) SI unit part no. LOCK FREE SI unit specifications SI unit part no.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Rotary Clamp Cylinders

1 o t y u w q r !9 @2 @5 @4 !

60

Clip E stop ring Solenoid coil Solenoid coil q Pull out the clip horizontally in direction q. Remove the E stop ring in direction q. q When doing this, do not apply twisting or torsion to the clip. Otherwise, the clip may be deformed. If the clip is deformed by mistake, replace it with a new one.

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Angle Seat Valve

In the case of liquid: P Q = 1.9 x 106 Av .(9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure differential [MPa] G : Specific gravity [water = 1] In the case of saturated steam: Q = 8.3 x 106 Av P (P2 + 0.1) .(10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure differential [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 11 Solenoid

NCQ8

Q Z 4 places C-depth D-rod dia.

Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

KQ2

Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon 53 Series KQ2 Delta Branch: KQ2UD H (width across flats) Applicable Effective area (mm2) Nylon Urethane Connection Note) Mass (g) A D1 D2 L I Q M P tubing O.D.

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

CRBU

M3: L = 6mm (mm) (mm) Size 15 20 30 Size 15 20 30 Q Q M3 M3, M4 M3, M4, M5 X 1.5 to 18 1.5 to 20 2 to 22 Y 1.5 to 19 1.5 to 10 2 to 13 M3 M3, M4 M3, M4, M5 Symbol: A3 Symbol: A4 Symbol: A5 The shaft can be further shortened by machining male threads on the long end of the shaft. (If the shaft is not to be shortened, leave the Y dimension blank.)

Angle Seat Valve /

In the case of liquids: DP Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av DP(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 11

CM2

168 181 206 231 256 25 36 19 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 36 19 32 12.5 25 37.5 50 75 100 125 72 85 97 110 135 160 185 149 162 174 187 212 237 262 40 46 22 41 12.5 25 37.5 50 75 100 125 77 90 102 115 140 165 190 181 194 206 219 244 269 294 Boss-cut Style With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) ZZ Q