LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S D20YB effective depth YC YA 2 View With internal shock absorber MSQAR MSQBR High precision type MSQAA: With adjustment bolt MSQAR: With internal shock absorber DJ DH DI FE HA (UV) (mm) (mm) FU DH DI DJ DK DL FE HA UV Size 10 20 30 50 Size 10 20 30 50 31.5 45h8 46h8 20H8 5 15H8 10 18.5 52.5 34.7 60h8 61h8 28H8 9 17H8 15.5 26 63 (Max. approx.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Adapter Plate Assembly SYJ500-3-2A SYJ500-3-1A SYJ500-3-1A-1-Q SYJ500-3-1A-2-Q Round head combination screw Round head combination screw Round head combination screw A Round head combination screw Round head combination screw Gasket Gasket Round head combination screw Round head combination screw Round head combination

VFR

Material Description AXT632-3(M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3(M3 x 32) VFR3000-26-4 VFR33/34/35 NBR Hexagon socket head screw Gasket !1 AXT632-3(M3 x 32) Refer to How to Order Pilot Valve Assembly on page 3-5-30. Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

0.4

Note) Electric current should be 1A or less (including the mounted valves).

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Series VQ Base Mounted Metal Seal/Rubber Seal

Note) Electric current should be 1A or less.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Series 12-REA Sine rodless cylinder

x 11.5 M12 x 1.25 x 7.5 192 180 0 26 25 0 32-0.039 167 Specific Product Precautions Be sure to read before handling. 12-CY1B/3B/1R/3R/REA.

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

Proposals for Energy Saving

Series VP342 VP542 VP742 VP300-27-1A VP500-27-1A VP700-27-1A Bracket (screws included) JIS symbols External Pilot Type (Optional) Type N.C. N.O. Body ported Use the external pilot type for the following cases. Standard Vacuum or low pressure of 0.2MPa or less Base mounted Consult SMC for holding vacuum.

VQC

A 1A () (+) SOL. B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL. A 2A () (+) SOL. B 2B () (+) Station 2 SOL. A 3A () (+) 1.

VS 8-2/VS 8-4

Manifold Options 18 mm and 26 mm sizes mixed An 18 mm valve can be mounted on a 26 mm manifold.

Plug-in Unit

A 1A () (+) SOL. B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL. A 2A () (+) SOL. B 2B () (+) Station 2 SOL. A 3A () (+) 1.