SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

3 Port Solenoid Valve

Lead wire length 46 -SCSJ3000For single solenoid: Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 46 -DCSJ3000For double solenoid : Common specifications 46 47 For positive common For negative common For junction common How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

VCA

32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

Air Cylinder Series CA2

and same surface) 1 85 90 95 D-M9 D-M9W (n 2) 2 15 80 CM2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 90 + 40 (n 4) 2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 15 + 40 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) CG1 2 (Different surfaces and same surface) 1 60 65 70 D-M9V D-M9WV (n 2) 2 55 10 MB 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n

CA2

1 Air Cylinder Series CA2 40, 50, 63, 80, 100 CJ1 CJP 4 1 CJ2 Able to absorb 30% more kinetic energy at the maximum. 5 to 15% reduction in weight By the adoption of die-cast cover, this model is 5 to 15% lighter than Series CA1.

Fluoropolymer Piping Equipment

39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4" 15 LQ1R6C-M 1" 1" 35 22.5 21.2 LQ1R6D-M3/4" 15 7 29 14 28 26 54 39 8 39.5

LEC-OM02704CN

15.2.5 (RWrn2) 15-23 15.3 15-24 15.3.1 () 15-24 15.3.2 () 15-26 15.4 15-30 15.4.1 15-30 15.4.2 15-31 15.4.3 15-32 15.5 15-33 15.5.1 15-33 15.5.2 15-33 15.5.3 15-34 15.5.4 15-35 15.5.5 15-36 15.5.6 15-36 15.6 15-37 15.7 15-39 15.7.1 15-39 15.7.2 1() 15-40 15.7.3 2() 15-50 15.8 15-59 15.8.1 JOG 15-59 15.8.2 JOG 15-61 15.9 15-62 15.9.1 15-62 15.9.2

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

HRX-OM-W002

(CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n : Stations L n 2 148 137.5 89 15 63 5 173 162.5 120.5 12 94.5 4 173 162.5 110 17 84 6 185.5 175 131 13 105 7 198 187.5 141.5 14 115.5 3 160.5 150 99.5 16 73.5 8 210.5 200 152 15 126 9 223 212.5 162.5 16 136.5 10 235.5 225 173 17 147 11 235.5 225 183.5 11.5 157.5 12 248 237.5 194 12.5 168 13 260.5 250 204.5 13.5 178.5 14 273 262.5 215 14.5 189 15 285.5 275 225.5 15.5 199.5 16

CV/MVGQ

30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 90 + 30 (n 4) 2 n = 4, 8, 12, 16 10-15-62

-fl Seies

th o.7 1 8 0 30 or less 0.95 (0.43) 3 position ,& ln case of NVFR2O00-OFZ-017 t_SpecialOrder Non-locking push type {extended), Lock type Note) Operaling pressure: 0^130PSl (0-g.okgl/cm'z) Pilot operating pressure 2 position double: 15-150PSl {1 -g.Skgycm?) 2 position singlei 3 posilion: 30^ 130PSl {2.0^9.0k9/cm'?)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

th o.7 1 8 0 30 or less 0.95 (0.43) 3 position ,& ln case of NVFR2O00-OFZ-017 t_SpecialOrder Non-locking push type {extended), Lock type Note) Operaling pressure: 0^130PSl (0-g.okgl/cm'z) Pilot operating pressure 2 position double: 15-150PSl {1 -g.Skgycm?) 2 position singlei 3 posilion: 30^ 130PSl {2.0^9.0k9/cm'?)

NA-080-INFLW

LFU20-Z11-3A-X2 ( Includes controller & connectors ) 30 30 2000 2000 LFU20-Z11-1A-X2 LFU20-Z11-3A-X2 (Includes controller & connectors) (Includes controller & connectors)

Magnetically Coupled Rodless Cylinder

(variation on the order of 30%) Large variations may occur depending on the surrounding environment. C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

(variation on the order of 30%) Large variations may occur depending on the surrounding environment. C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

VDW

4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5 M5 10 42.5 4 11 15.5 30 15 22 20 8 13.5 M3 M5, 1/8 11 5 15 17 36.5 11