Aluminum High Vacuum Angle Valve

XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40A-30-1 XLF40-30-1H XLF40A-30-1H XLFV40-30-1 XLFV40A-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLH40-30-1 25 XLA25-30-1 XLA25A-30-1 XLA25-30-1H XLA25A-30-1H XLAV25-30-1 XLAV25A-30-1 XLC25-30-1 XLC25-30-1H XLCV25-30-1 XLF25-30-1 XLF25A-30-1 XLF25-30-1H XLF25A-30-1H XLFV25-30-1 XLFV25A-30-1 XLD25-30-1 XLD25-30-1H XLDV25

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

Series SV

II Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV1000 Applicable bore size: 20, 25, 32, 40 Applicable related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E 4.7 1F 72 3F 18.2 5F 4.5 5 30 5.

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

Table of Contents

(25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.

LEC-OM07605CN

PA09] (LECSS -S ) (LECSS -S ) [Hz] [Hz] 1 2.7 21 67.1 17 3.6 22 75.6 18 2 3 4.9 23 85.2 19 4 6.6 24 95.9 20 5 10.0 1 25 108.0 21 6 11.3 2 26 121.7 22 7 12.7 3 27 137.1 23 8 14.3 4 28 154.4 24 9 16.1 5 29 173.9 25 10 18.1 6 30 195.9 26 11 20.4 7 31 220.6 27 12 23.0 8 32 248.5 28 13 25.9 9 33 279.9 29 14 29.2 10 34 315.3 30 15 32.9 11 35 355.1 31 16 37.0 12 36 400.0 32 17 41.7 13 37

7.5

However, for any other mounting method or for side facing and rear facing, etc., secure the DIN rail with bolts at uniform intervals using the following as a guide: 2 to 5 stations at 2 locations, 6 to 10 stations at 3 locations, 11 to 15 stations at 4 locations, 16 to 20 stations at 5 locations, 21 to 25 stations at 6 locations, 26 to 30 stations at 7 locations and more than 30 stations

Table of Contents

V 80 mA or less 25 mA or less Red light blinks.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

VFR

Note 2) Min. operating frequency is once in 30 days.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-59-2A 10-SV1000 16 SX3000-77-1A SX3000-77-1A 10 SV2000-59-1A SV2000-59-2A 10-SV2000 16 SV2000-59-3A SV2000-59-3A 10 SV3000-59-1A SV3000-59-1A 10-SV3000 10 SY9000-57-1A SY9000-57-1A 10-SV4000 261 Manifold Option 10-SV Manifold Option Circular connector / Cable assembly (26 pins) D-sub connector / Cable assembly (25 pins) AXT100 MC26 AXT100 DS25 Directional Control Valves Air Grippers

XL-OMY0002

40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401

High Vacuum L Type Valve

Bonnet assembly/construction part number:1 Temperature Valve size specifications 25 40 50 General use XLD25-30-1 XLD40-30-1 XLD50-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H Temperature Valve size specifications 63 80 100 160 General use XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 High temperature XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H Note1) The magnet for auto

Table of Contents

30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

42

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)

SZ3000

(Manifold specifications sheets are on pages 30.)

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

5 Port Solenoid Valve

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve SV 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold SYJ Blanking plate SZ Valve + Individual SUP spacer (VVQ5000-P-1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 VF Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-

45

Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.