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PF12] 10.3.1 (1) 10.3(10.2) ((2)) ON EM1 (1) OFF V 0 t e 10.3 V0 JM te + 1 + JL (10.2) Lmax = 60 Lmax : [mm] V0 : [mm/min] JM : [X10 2] -4 kg m JL : [ 10 2] -4 kg m : [s] te : [s] LECSS2-T10ms 10 5 10.

(lbs) 2 x 7 through CKZT40-A015CS CKZT40-A015RS CKZT40-A015LS 0.49 (1.08) 0.51 (1.12) 0.51 (1.12) 200.02 900.1 117 48 16 220.1 150.2 50 How to Order Right type CKZT50 A015 C S 44 34 Arm position 48 68 C R L Center Right Left 20 Center type Left type Mounting hole 2 x D1H7 through Symbol D1 6 8 D2 9 10.2 2 x D2 through S B (9) 300.2 300.02 1050.1 Weight kg (lbs) CKZT50-A015CS CKZT50-A015CB

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

www.stevenengineering.com l 300 200 300 MGTL80 CX P = 0.5 MPa m 200 MGTM80 100 P = 0.5 MPa Load weight m(kg) Load weight m(kg) D40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 -X 50 40 25, 50st 10 30 205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P =

kg kg kg Allowable load weight coefficient Allowable moment coefficient Damper coeficient Workpiece mounting coefficient 8-6-7 8 Series MXF Operation Guide for Slide Table MXF Mounting of Slide Table Precautions The slide table can be mounted from 2 directions.

(Current model: 4.2 kg) AFF AM AMD 80D 4.7 kg Max. 52% lighter AFF AM AMD New New Current model 90D 5.0 kg (Current model: 10.5 kg) Increased air flow capacity due to lower pressure drop which contributes to energy saving Max.20 % increase 20% increase Flow capacity: 14.5 m3/min (ANR) Pressure drop reduced Pressure drop: 5 kPa or less Current model For AFF/AM/AMD90D Pressure drop AFF AM

CXTM (Slide bearing) CXTL (Ball bushing bearing) Max. movable weigh (kg) MXF Allowable static weight (kg) Allowable static weight (kg) Table displacement (mm) Table displacement (mm) Series MXW CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 3 7 12 20 30 50 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 0.015 0.019 0.044 0.180 0.123 0.109 60 70 125 125 140 170 For moving and transporting

(MPa) Pv: Maximum operating pressure for vertical operation (MPa) WBmax: Maximum load weight (kg) when loaded directly on the body W: Load weight (kg) WB: Connection bracket weight (kg) : Guides coefficient of friction Lo: Distance from cylinder shaft center to work piece point of application (cm) L1: Distance from cylinder shaft center to connection fitting, etc.

) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Weight Flange (kg) Rotation angle Basic weight (kg) Size Add'l stroke weight (kg/mm) 80 to 100 1.4 32 0.004 0.5 170 to 190 1.5 80 to 100 2.1 40 0.5 0.005 170 to 190 2.3 Calculation method: (Ex) MRQBS32-50CA Stroke additional weight.0.004 X 50 = 0.2 kg Basic weight.1.4 kg Total 1.6 kg Weight of a single auto switch Unit: g Length of lead wire Applicable auto switch Auto switch model 10 52

Table: Without sub-plate, With sub-plate: Add 0.41 kg for plug-in type, 0.30 kg for plug lead type.

(MPa) Pv: Maximum operating pressure for vertical operation (MPa) WBmax: Maximum load weight (kg) when loaded directly on the body W: Load weight (kg) WB: Connection bracket weight (kg) : Guides coefficient of friction Lo: Distance from cylinder shaft center to work piece point of application (cm) L1: Distance from cylinder shaft center to connection fitting, etc.

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

\/o 5r.0 44.0 N/A ftlA N/A 35.019.23 kg 127 .0 51,0 57.2 0ElUl4.0lUlx2(M(S) 50 15. 90.5 l?

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

kg kg kg Allowable load weight coefficient Allowable moment coefficient Workpiece mounting coefficient 8-5-15 16 Series MXQ Dimensions: MXQ6 Basic style For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.

effective area Q=11S P(P2+1.033).kg/h Equation in the domain of sonic flow Calculation by Cv factor Q=98.9Cv(p1+1.033).kg/h Calculation by effective area Q=5.51S(P1+1.033).kg/h 4.2-38 VND Flow Characteristics Water/VND 2 to 7 should be N.O. to suppress water hammer.

How to Calculate Flow/Saturated Steam qEquation in the domain of subsonic flow P1+0.1013=(1 to 2)(P2+0.1013) Calculation by Cv factor Q=197.8Cv gP(P2+0.1013)kg/h Calculation by effective area Q=11.0S gP(P2+0.1013)kg/h wEquation in the domain of sonic flow P1+0.1013 2(P2+0.1013) Calculation by Cv factor Q=98.9Cv(P1+ 0.1013) kg/h Calculation by effective area Q=5.5S(P1+0.1013) kg/h The