Thermo-con

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

Air Slide Table/Long Stroke Type Series MXY

Symbol Symbol Definition Unit mm mm Nm Nm Nm Nm Nm Symbol Definition Allowable static load Collision speed Unit N mm/s mm/s kg kg kg DF V An (n = 1 to 3) Corrected value of moment center position distance Ln (n = 1 to 3) Overhang -X M (Mp, My, Mr) Va Average speed Static moment (pitch, yaw, roll) Ma (Map, May, Mar) W Load mass Allowable static moment (pitch, yaw, roll) Individual -X Me (

Cylinder with Lock

F 58 psi Chart (6) m 73 psi Chart (7) F 1 Cylinder with Lock Series CNA2 Selection Chart Chart (5) Chart (2) 44 psi P < 58 psi 44 psi P < 58 psi 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 80 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 50 40 30 50 40 30 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s

3 Position Cylinder Series RZQ

Load mass (kg) 40 50 40 32 E = 2 M + m 2 30 20 E = Kinetic energy (J) M = Mass of non-moving part (kg) m = Mass of moving part (kg) = Piston speed (m/s) 10 5 150 100 200 300 Model Selection Maximum speed (mm/s) RZQ Moving Part Mass Unit (kg) 2. Use the cylinder in applications in which the overrun will not cause any problem.

Water-cooledThermo-chiller

) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Air Cylinder

] Air consumption [L (ANR)] Judgment when 37 kg of output is required The next bore size after 40 is 50.

Thermo-con/Rack Mount Type

(Page 20) Communications RS-232C/RS-485 Weight Approx. 14 kg Approx. 18 kg Approx. 21 kg Approx. 31 kg Approx. 33 kg Accessories Power supply connector, Operation Manual Power supply cable should be ordered as an option (sold separately, page 22) or prepared by the user.

HRL

(including 6 M8 bolts)7 Weight (dry state) [kg] Approx. 222 Approx. 251 Approx. 315 1 Use fluid in condition below as the circulating fluid.

Series AP3100

) 3) 1.61 lbs (0.73 kg) 3) 0.88 lbs (0.4 kg) 3) 0.8 lbs (0.36 kg) 3) 1/4 turn round knob with open/close indication window 1/4 turn lever knob 4) Pull twist knob with LOTO 5) Knob Multi turn round knob Option (Part number: AP PL227) 6) Operational Safety Device (OSD) LOTO (Lockout) N/A Standard N/A Option (Part number: AP PL225) 6) 1) 14 to 194F (10 to 90C) for Vespel seat.

CNA

weight: m (kg) 63 50 50 40 30 50 40 30 CL1 40 20 20 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 CNA 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNS Maximum speed: V (mm/s) Maximum speed: V (mm/s) CLS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63

CP95

0.16 (kg/50 st) Cylinder stroke 100 (st) 0.87 + 0.16 x 100 50 + 0.32 = 1.51 kg Mounting 0.32 (kg) (Double clevis) C95 CP95 NCM NCA D-X 20Data 6-13-7 7 Series CP95 Construction [First angle projection] !

42

Table: Without sub-plate, With sub-plate: Add 0.41 kg for plug-in type, 0.30 kg for plug lead type.

CP95

0.16 (kg/50 st) Cylinder stroke 100 (st) 0.87 + 0.16 x 100 50 + 0.32 = 1.51 kg Mounting 0.32 (kg) (Double clevis) C95 CP95 NCM NCA D-X 20Data 6-13-7 7 Series CP95 Construction [First angle projection] !

Guide Table Series MGF ø40, ø63, ø100 1

Weight of total loads: Wo (kg) Wo = (Load weight: WA) + (Jig weight: WB) 4.

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

HRX-OM-Q026

(including 6 pcs. of M8 bolts)*9 Weight (in the dry state) kg Approx. 150 Approx. 180 1: Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature or the circulating fluid temperature is 10 oC or less.

HRX-OM-X010

Use assistance to carry object over 20 kg. Check that all parts and screws are returned to the pre-work conditions at the end of work. Do not work when intoxicated or feeling ill. Accidents may occur if disregarded. Do not remove a panel unless permitted in this manual.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

mb1

/50 = 0.85 kg CJ2 CM2 CG1 Construction MB MB1 !