Vacuum System Peripherals:

block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

A

/DC or less 50 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 48VAC/DC 40 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 100VAC/DC 20 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C73CL 24VDC 5 ~ 40 None Sequence Controller Connector D-C7 type D-C8 type D-C80CL 24VAC/DC or less

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/721-C8(-L) Rear ported !

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BLOCK ASSY, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.4356 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.46075 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.4312 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.4312 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.4312 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.46075 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.45826 lb

Please contact us for the latest version.sales@ocaire.com, Manifold Block Assy, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.47553 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, MANIFOLD BLOCK ASSY, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.506 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, MANIFOLD BLOCK ASSY, VALVE, SS5V4 MANIFOLD SV4000, 21, SS5V4 NO SIZE RATING, 0.495 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V4 MANIFOLD SV4000. MFLD BLOCK ASSY. VALVE. SS5V4 NO SIZE RATING. 0.44 lb. 21.

CM2

Minimum Strokes for Auto Switches Mounting (mm) Number of switches 2 n Auto switch model On the same surface On different surfaces On the same surface 1 On different surfaces D-C7 D-C8 D-H7l D-H7lW D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50+45(n2) 50 15 n2 2 15+45 ( ) (n=2, 4, 6) 10 60+45(n2) 60 15 n2 2 15+50 ( ) 10 65 15 (n=2, 4, 6) 65+50(n2) n2 2 20+50 ( ) (n=2, 4, 6) D-H7LF 10 65 20 D-B5