3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

0.01

(C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

Air Cylinder Series MB

97 6 20 27 19 60 32 110 136 54 With Rod Boot l h Bore (mm) d e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 40 50 63 80 100 50 50 50 50 50 50 37.5 37.5 37.5 37.5 37.5 37.5

VQ20/30

Viscosity of the operating fluids must be less than 50 cst in general.

Intrinsically Safe Valve

Equipment Type of actuation 53-SY5000 53-SY7000 53-SY9000 Uo (or Voc) lo (or Isc) Po Co (or Ca) Lo (La) Ui li Pi Ci + Ccable Li + Lcable 2-position single 26 or less 38 or less 50 or less 2-position double 22 or less 30 or less 50 or less 3-position 38 or less 56 or less If the cable capacitance and inductance are unknown, use the following values: Ccable = 60 pF/ft., Lcable = 0.2 H/ft.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

Fieldbus System

L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.

IP8001 Series

(740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

MB

to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 50 111 36 23 12.5 25 37.5 73 86 98 75 100 125 136 161 186 50 119 41 23 12.5 25 37.5 81 94 106 75 100 125 144 169 194 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 127 51 25 12.5 25 37.5 89

IP8101 Series

)1/0.96 (740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

AN

Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Response time (ms) (0.5 MPa) Type of actuation 52-SY5000 26 or less 22 or less 38 or less 52-SY7000 38 or less 30 or less 56 or less 52-SY9000 50 or less 50 or less 70 or less 2-position single 2-position double 3-position Note 1) According to dynamic performance test JIS B8375-1981. Note 2) Response time when barriers were combined with a valve.

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.