SZ3000

Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position

V

0.5 9 0.6 VX3224-03 2.2 0.19 3.4 1 1 VX3324-03 2.2 0.19 3.4 3/8 (10A) 0.3 VX3234-03 3 0.33 6 0.6 VX3334-03 3 0.33 6 0.15 VX3244-03 4 0.5 9 0.3 VX3344-03 4 0.5 9 Courtesy of Steven Engineering, Inc. !

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

Series PF2W Digital Flow Switch For Water

pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 0.05 L/pulse Display units Instantaneous flow rate Accumulated flow L/min, gal(US)/min Note 1) L, gal(US) Accumulated flow range Note 1) 0 to 9 L, 0 to 9 gal(US) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC 10% (With power supply polarity protection) 55 mA or less

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B B 1 3 2n-M3 0.5 (A, B port) (Pitch) P=10.5 11.5 SS5YJ3-S31Station -M3 [ ] for AC L type plug connector (L) M type plug connector (M) 91.7(GZ:93.1) [95.1] 78.8(GZ:80.2) [82.2] 52.4(GZ:53.1)[54.1] 18.5 13.5 3 31.5 6.5 1 R A A A A A 51.4(GZ:52.1) [53.1] R 79.4 [82] 1 30.5 P B B B B B P 51.7 [53] 61.3 92.3 [94.9] (Lead wire length) 98.6 111.6 (Pitch) P=10.5 9 23.5 (Mounting holes) L2 3.5 L1

CLQ

10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth 7 9 7.5 60 6.5 16 22

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

Thermo-chiller

/Japanese 1 pc.), Anchor bolt fixing brackets 2 pcs.(including four M8 bolts), Cable accessory 1 pc. (For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Digital Flow Switches

2, NPT 2, G 2 46 M6 x 1 9 0V 75 220 55 114 89 75 56 M6 x 1 9 50msec PF2A7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Compact Cylinder with Lock Series CLQ

10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth 7 9 7.5 60 6.5 16

Stroke Reading Cylinder and Counter

0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

SMC Basic Pneumatics

9 1 9 1 9 1 9 20 21 21 21 21 22 22 6 ACTUATORS Linar Cylinders Single Acting Cylinder Double Acting Cylinder Cylinder Construction Cushioning Special Cylinder Options Double Rod Non Botaling Bod Twin Rod Flat Cylinder Tandem Cylinder Multi Position Cylinder Cylinder Mounting Floating Joints Buckling Strength Cylinder Sizing Cylinder Force Thoretical Force Bequked Force 49 49 49 49 50 9U 51

Modular Type Lubricators Series AL

12316 123156 12314PA Sight dome 3 1 Lubrication plug assembly 4 1 123528A Standard Bumper assembly 5 1 Note 1) -2, -8 123528-1A Note 1) Needle stud assembly 6 1 123128PA 124232A 123321-1A 123321-4A 12318 123111 113136 KA00466 Standard -8 -1 Siphon tube assembly 7 1 Sight dome seal Siphon nut seal O-ring O-ring 8 9 10 11 12 13 Urethane rubber 1 1 1 1 1 1 Urethane rubber NBR NBR Bumper retainer

%silltr

9 1 9 1 9 1 9 20 21 21 21 21 22 22 6 ACTUATORS Linar Cylinders Single Acting Cylinder Double Acting Cylinder Cylinder Construction Cushioning Special Cylinder Options Double Rod Non Botaling Bod Twin Rod Flat Cylinder Tandem Cylinder Multi Position Cylinder Cylinder Mounting Floating Joints Buckling Strength Cylinder Sizing Cylinder Force Thoretical Force Bequked Force 49 49 49 49 50 9U 51

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore