EXxx-OMN0037CN

10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7

Modular Type Regulator Series AR

59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Terminal block numbers 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 24 Series PF2W Dimensions: Remote Type Display Unit for Water (4-channel Flow Monitor) PF2W200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel 55 or more 37.5 +0.1 -0.2

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

LFE-OMY0008

[F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (33 ) 30 No.LFE*-OMY0008 c. ()/() ( [n1AH]) ( [n1dH]) () 31 No.LFE*-OMY0008 ( ) 3 6 3 1 3 6 6 1 1 1 32 No.LFE*-OMY0008 4. 4. 4. 4.

REC

X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double Power Cylinder Series

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

Refrigerated Air Dryer

Model Applicable transformer Model Dimension Total weight (kg) A Weight (kg) B C D 171 217 30 40 43 50 31 35 44 51 35 39 48 55 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF4E-10 284 573 345 315 171 217 IDF6E-10 IDU3E-10 IDF-TB403 6 284 171 217 IDF8E-10 IDU4E-10 643 370 340 284 Note) Weight

Compact Hydraulic Cylinder Series CH
KGB

30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth

SX

6-124 to 1-6-138.)

0.4

C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1

0.4

18 5 17 4 16 3 15 2 14 1 Station 1 VQ 1/2 VQ 1/2 Station 2 VV5Q11 VQ 4/5 Station 3 Station 4 Stations VQC 1/2 D side U side Station 5 VQC 4/5 Station 6 Station 7 VQZ Connector terminal no.

Electric Actuator with Integrated Guide

rail T-slot dimensions) Body mounting reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100K--X10 LTF6EPF200K--X10 LTF6EPF300K--X10 LTF6EPF400K--X10 LTF6EPF500K--X10 LTF6EPF600K--X10 2 3 4 5 6 7 1.

V

Orifice Size (Number) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

HRX-OM-X037

Refer to Table 5.4-6 Offset setting for details. (1) (2) Offset setting Table 5.4-6 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !