IDU/IDF 40C 13 to 15 R22 37 6100 5200 IDF37C/37C1 R 11/2 55 9000 7650 IDF55C R 2 75 12400 10500 IDF75C 2 1/2B flange 23000 IDF120D 20 120 30 IDF150D 25000 150 40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18
13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18
1 R25 19 18 19 R6 A B 90.0 120.0 150.0 Weight kg 0.8 0.9 1.1 Part no.
42 14 22 30 M14 x 1.5 12 14 10 50, 63 Y-G05 56 20 28 40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.
COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon
Description Material Return spring Gasket VF4000-18-1 VF4000-20-1 VF4000-20-1 VF4000-18-2A VF4000-20-1 Stainless steel NBR o !0 !1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !
SP 18 20 ZR1 1-K1M-DZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 AMJ A B AMV A B S A B AEP 75.3 HEP 7.2 1 Related Equipment A B A B S A B Digital pressure switch for vacuum 109 1 (Port exhaust) 114 1 (Built-in silencer) 109 PE A (79.8) 1 85 1 PD 60 1 PS PV 147 (2000) 957 Series ZR Ejector exhaust Vacuum V port Ejector System with Valve Pilot pressure exhaust PE port Circuit diagram Release
32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q R S Q R S T 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 64.5 67 67 67 69.5 69.5 69.5 36 46 44 45 50 48.5 49.5 52.5 55 55 55 57.5 57.5 57.5 99.5 38 47.5 46 47 52 50.5 51.5 68.5 71 71 71 73.5 73.5 73.5 78.5 88.5 87 90 93 91.5 94.5 102 102 102 104.5 104.5 104.5 2 3 12 Direct Operated 2 Port Solenoid
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable
(P.19) 18. (P.79) USB LAN 8 - 2.4 () 1 (LECPMJ-) 1 1 *1 1 *1 (LE-CP---) 1 *2 (LEC-CMJ-) 1 *1 *2 [] (: LEC-T1-3G) (LEC-W2) (USB ) 2 3.4 (P.15) 3 4.1 (STAION NO.B RATE)(P.17) 4PLC PLC 4.3 PLC (P.18) 5 (CN1CN5) 5. (P.19) 9 - 6 DC24V LED LED PWR ALM LED 8. LED (P.28) LECLEDALM CC-Link CN4 I/O 16.
8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9
TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.
(Non-locking push type) Pilot port 12(P1), 10(P2) Port size: refer to table below Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A K B L C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 229.5 (215.5) 247 (233) 270 (256) 105 120 140 197 214.5 237.5 77 96 113 55 63 74 53 60 74 26.5 30 37 120.5 137 160 20 24
A 1 () () [] A 2 LECSSSeries/ / *3) 1 1.5 *3)1 1 A 3 1. 15P()-N() 2. L1L2L3 (MC) 3. () () A 4 4. (1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .
Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !
1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332 MY340 MY350 MY363 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 1 1 1 1 1 1 1 1 1 1 1 72 90 100 38 50 55 60 32 36 40 20 21 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 6.5 6.5 9 4.5 4 5.5 5.5 10 10 12 12 16 16 19 6 6.5 9.5 9.5 11 11 14 Applicable