AS

/FPG How to Order 1 1 2 F P Q 01 06 AS 2 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 Series Assembly part no.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

AW

160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5

Hygienic Design Cylinder Series HY

8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF G 1/8 G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 TN NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 81 81 83 95 107 107 131 131 5 5 6 6.5 8 8 9.5 11.5 6 8 10 13 16 16 22 27 30 30 35.5 44 55 69 80 100 24 29 35.5 44 55 69 80 100 33 33 69 69 71 78 90 90 108 108 D-X Individual -X Technical data 857 Hygienic

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Guide Cylinder/Compact Type Series MGC

12 31 13 98 47 44 37 80 153 25 35 60 80 105 50 32 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 40 70 95 125 60 38 M8 x 1.25 1/8 25 12 47 20 132 63 60 44 92 188 33 45 82.5 115 150 75 50 M8 x 1.25 1/4 26 14 58 25 162 73 70 55 104 241 40.5 Bracket Mounting Stroke Without Rear Plate Long Stroke Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Z R Y 20

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56 66 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 86 107 120 138 150 171 198 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 25 30 36 45 55 68 87 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 12.5 18 19.5 23.5 28 34.5 36 Up to 800 Up to 800 Up to 1000

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

mb1

, refer to page 6-17-1.)

70astamb1

6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5

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One-touch Fittings

8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.50 Variations P.51 Dimensions P.52 Made to Order/Clean Series/ Spare Parts P.55 Inch P.49 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Face Seal Connection thread Applicable tubing G R Rc NPT R How to Order P.58 Variations P.59 Dimensions P.60 Spare Parts P.63 Metric P.57 2 3.2 4 6 8 10 12 16 V V How to Order P.66 Variations P.67 Dimensions

Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 Solenoid Plug-In Factor 4.4 5.4 5.7 4.4 5.4 5.7 3.7 4.6 4.8 3.9 4.8 5 3.9 4.8 4.9 2.2 2.7 2.8 Time (ms) Single NVFS5100 45 or less 2 Position Double NVFS5200 25 or less Closed Center NVFS5300 55 or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 29.5 39.5 37.5 51 49 48.5 54 58 57.5 56 59.8 69.5 68 66.5 80 78.5 77.5 96.5 95.5 93.3 14 9 1/4" 17 16 43.5 42.5 14 20 16 55 52 3/8" 22.5 21 18 19.5 25 62 59 64 62 1/2" 24.5 24 22 29 22.5 69.3 67.1 3/4" 76 73.5 26.5 32 30 37 24 1" 88 84 30 41 36 49 26 1 1/4" 106 106 35 50 46 64 35 326 Series LQ3 Fluoropolymer Fittings Hyper Fitting / Flare Type Dimensions