CJ5-S

8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 Rc 1/4 109 63 J Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19

CJ5-S

8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 Rc 1/4 109 63 J Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

IDG

With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 IDG60M/60HM IDG75M/75HM/100M/100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 14-19-42 39 Series IDG Membrane Air Dryer Unit Type IDG60LM/75LM/100LM IDG60SM/75SM/100SM Port size 3/8, 1/2 (250) 91 Purge air for dew point indicator 50 77 84 13 18 22 IN OUT 40 10

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 19 20.5 21.5 24 26 P (Piping port) Model TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40

CNG

) M10 x 1.25 107 8 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12) 15 (16) 33 20 4 12 M6 x 1 depth 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 178 (186) H e f h ZZ 35 30 55 198 (206) 16 193 (201) 40 30 62 215 (223) 17 Stroke x 196 (204) 40 35 62 218 (226) 17 221 (230) 50 35 70 241 (250) 17 Note) Dimensions inside ( ) are for long strokes.

CNG

2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15 (16) 33 8 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ e f h ZZ H 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke 40 193 (201) 30 17 62 215 (223) 40 196 (204) 35 17 62 218 (226) 50 221 (230) 35 17 70 241 (250) Note) ( ): Denotes

Precautions 1

Auto switch mounting Bore size (mm) 40 32 25 20 D-A9 D-M9 D-M9W Note 1) Note 1) Note 1) Note 1) 1 BM2-040 1 BM2-032 1 BM2-025 1 BM2-020 2 BJ3-1 2 BJ3-1 2 BJ3-1 2 BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF BM2-040 BM2-032 BM2-025 BM2-020 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-040 BA2-032 BA2-025 BA2-020 Note 1) Two kinds of auto switch mounting brackets are used as a set.

Cylinder with Lock Series CNG

169 (178) 107 8 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12) 15 (16) 33 20 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 178 (186) H e f h ZZ 35 30 55 198 (206) 16 193 (201) 40 30 62 215 (223) 17 Stroke x 196 (204) 40 35 62 218 (226) 17 221 (230) 50 35 70 241 (250) 17 Note) Dimensions inside ( ) are for long strokes.

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Modular Type Regulators Series AR

34 36 128 M42 x 1.5 34 3.5 35 45 42.5 74 42.5 74 70 1/4 1/4, 3/8, 1/2 28 27.8 36 34 3 75 129 M42 x 1.5 34 35 45 42.5 74 42.5 74 3/4 1/4 AF 28 27.8 43.5 43 3.3 169 90 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 3/4, 1 28 27.8 43.5 176 46 3.3 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 95 1 AR Optional specifications AL Bracket mount Panel mount Model M N Q R S T U V W Y Z AW AR10 AR20(K) AR25

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

16, 20, 25, 32, 40, 50, 63 How to Order Bore size 16 to 25 M9BW 20 MHS4 D 4 fingers Number of fingers 4 Number of auto switches Nil S 2 pcs. 1 pc.

Compact Cylinder with Air Cushion Series RQ

45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 30 to 100 mm Bore size (mm) OB P Q RB W Z 32 40 50 9 23 7 49.5 14 1/8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

10

) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

SYJ3000/5000/7000

DC specifications of type D One-touch fitting for 1/4" and DO is only available One-touch fitting for 5/16" with 12 and 24 VDC.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).