CXS

mounting. 37 Series CXSW Dimensions: 25, 32 ZZ CXSW25 SS 12 S 12 12 12 30 (30) Z 6 30 2-M8 x 1.25 x 6 (Hexagon socket head set screw) 2-6.9 through 2-11 counterbore with depth 6.3 2-R3.5 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 35 80 64 6.3 5 2-R3.5 8 12 14 4-M6 x 1 (Through) 4-M5 x 0.8 with depth 7.5 2-M6 x 1 x 18.5 (Hexagon head bolt) 2-M6 x 1 (Hexagon nut) 2-M6 x 1 x 14 (Hexagon socket head

C92

18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 1/8" 10 25 11.5 10 21 1/8" 31.5 15 35 16.5 14 14 1/4" 29 1

CJ2

D-A7/A8 D-A7H/A80H D-A73C/A80C 10 2 5 1 D-F7 D-J79 D-F7V D-J79C D-A79W D-F7W D-J79W D-F7BAL D-F7WV D-F79F Rail mounting 2 5 1 5 2 15 ( ) 10 1 10 16 2 15 D-F7LF 1 15 Note 1) Cannot be mounted on 6 cylinder. 1.3-14 Standard: Double Acting Double Rod Series CJ2W Mounting Accessories/Refer to p.1.3-12 details.

Process Valve Series VNA

5.5 6.5 D 14 14 17.5 20 P 24.3 24.3 28.3 33.3 E 72.5 72.5 84 100 Q 2.3 2.3 2.3 2.3 F 80.5 80.5 92 108 R 25 25 30 35 H 87 87 92 93 S 34 34 43 49 J Note) T 55 55 60.5 73 Model VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 180.5 (166.5) 180.5 (166.5) 192 (178) 208 (194) Note) ( ): CE compliant product (-Q) Threaded Type/Port size: 32A, 40A, 50A Electrical entry port: G1/2 Manual override

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

KJ

5 32 36 12 16 3 10.4 10.4 1 4 1 8 1 4 38 39 40.5 40 40.5 46.5 46 45.5 14 3 16 16.5 3.5 11.4 11.4 1 8 14.29 1 4 3 8 15 17 4.6 13.2 13.2 1 4 17.46 1 8 20 18 25 1 4 3 8 5 16 18.5 6 15.2 15.2 17.46 38 32 37 1 4 Connection thread 50.5 56.5 19.05 3 8 1 2 3 8 21 7 17.9 17.9 22.23 51 59 30 26 1 4 55 61 22.23 3 8 1 2 22 9.6 21.7 21.7 1 2 54.7 62.7 50 Reference dimensions after Uni thread installation

Sine Rodless Cylinder Series REA/REB

8 17 13 36 15 M26 x 1.5 Rc 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 13 46 19 M32 x 2.0 P TN S W X ZZ R T Model Nil TF REA25 REA32 REA40 Rc 1/8 NPT 1/8 111 50 30 137 8 17 Rc 1/8 G1/8 NPT 1/8 124 50 40 156 8 17 Rc 1/4 NPT 1/4 150 60 40 182 10 19 REA50/63 14 2 x P L NA 33 14 E(h8) E(h8) I X D REA REB 4 x TC Effective thread depth R 14 REC 8 x Q Effective thread depth R 14 22 23 25 K W

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

High Vacuum Angle Valve, XL Series

Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 A Mark A Mark Manifold gasket Manifold gasket VJ3000-14 -3 VJ3000-14 -1 Applicable manifold base SS5YJ3-20 Applicable manifold base (sub-plate) SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 Configuration of surface is different.

LEC-OM02904

A 1 () () [] A 2 LECSSSeries/ / *3) 1 1.5 *3)1 1 A 3 1. 15P()-N() 2. L1L2L3 (MC) 3. () () A 4 4. (1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .

Mechanically Jointed Rodless Cylinders

1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332 MY340 MY350 MY363 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 1 1 1 1 1 1 1 1 1 1 1 72 90 100 38 50 55 60 32 36 40 20 21 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 6.5 6.5 9 4.5 4 5.5 5.5 10 10 12 12 16 16 19 6 6.5 9.5 9.5 11 11 14 Applicable

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

JXCx-OMT0061CN

LED . 28 8.1 LED . 28 8.2 LED . 28 9. . 29 9.1 . 29 9.2 No. . 29 9.3 / . 29 9.4 . 30 9.5 . 30 10. . 32 10.1 . 32 11. . 47 11.1 . 47 11.2 . 50 11.3 . 52 11.4 . 53 12. . 54 12.1 . 54 12.2 . 54 12.3 . 55 (1) . 55 (2) () . 55 (3) . 55 12.4 . 56 12.5 . 56 13. () . 57 13.1 . 57 13.2 . 58 14. . 59 14.1 . 59 14.2 No. . 59 [1] . 59 [2] . 60 2 - [3] . 61 [4] HOLD . 61 [5]

VM

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 4) Based on dynamic performance test, JIS B 8375-1981. (0.5 MPa, Coil temperature: 20C, at rated voltage, without surge voltage suppressor) Note 5) For VFR400-FZ, ( ): VFR410DZ, < >: VFR440-GVFR410 VFR411 VFR414 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3.2 14 0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4