CL

50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112

Table of Contents

40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52 1 The VX series will be revised shortly.

Stability of suction position,

ZP3E-TF40UMJBL Rc1/8 Width across flats 14 Width across flats 14 Rc1/8 Bushing Bushing 19.2 A B 35 9 9 14.5 19.2 A B 35 9 9 Bushing Width across flats 27 M18 x 1.5 Bushing Width across flats 27 M18 x 1.5 Width across flats 14 Width across flats 14 17 31 17 31 14.41) 2.5 2 14.41) 14.5 2.5 2.5 30 30 (Rotating angle) (Rotating angle) 35 32 43 40 Dimensions Dimensions Model A B Weight [g]/Pad

Magnetically Coupled Rodless Cylinder

40 13.7 (6.23) 5.36 14% 40 6.23 At 100 stroke At 100 stroke Plate Plate Reduced in length Overall length is reduced, but interchangeable with the existing model.

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

15

x 12 M5 x 25 10 LZ 32 LC3F2 NZ M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NX M5 x 0.8 9 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5

Micro Mechanical Valve Series VM1000

Push-lock Turn-reset Type, Mushroom Push Button X219 VZM450-01-30R/B/G/Y-X219 40 T.T. Panel mounting hole 1.5 1.5 31 30.5 M5 x 0.8 3 25.5 (Pilot exhaust port) 0.8 to 7.5 (147.5) PE EA P EB (116.5) Symbol (B) 2 (A) 4 A B 91 14 14 17.8 17 23.3 12.8 38 36 14 12 3 (EB) 1 (P) 5 (EA) 30 26.7 22.5 2 18 3 13 0.5 MPa supply 13.8 5 x 1/8 T.T. F.O.F. 5.8 mm 21 N 2 x 3.5 mounting hole 40 T.T.

MNB

attached with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 ML1C 12.5 M14 x 1.5 M14 x 1.5 16.5 M18 x 1.5 M18 x 1.5 D23.5

MNB

attached with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 ML1C 12.5 M14 x 1.5 M14 x 1.5 16.5 M18 x 1.5 M18 x 1.5 D23.5

ZP

N 11.8 N First mounting load Second mounting load 10 N 15 N 13-11-75 Series ZPT ZPT HJ-B01-A18 (With buffer) 40 50 ZPT HJ-B01-A18 (With buffer) 63 80 Hexagon width across flats 14 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 Width across flats 16 Width across flats 16 Width across flats 24 (mm) (mm) Model A 40 ZPT40HJ25-B01-A18 D 118.5 40 ZPT40HJ50

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

Electric Actuator/Slider Type

25 M6 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 93 Electric Actuator/Guide Rod Type Series LEYG Dimensions: In-line Motor LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model

Modular Design with Uniform Body Style

41.6 25 21 2 30 24 33 5.5 11.5 3.5 29 38 AC30B-D 1/4, 3/8 1/8 110.2 115.4 30.5 30 55.1 35 26.5 3.5 41 35 7 14 6 42.5 42.5 AC40B-D 1/4, 3/8, 1/2 1/8 145.2 147.1 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 AC40B-06-D 3/4 1/8 155.2 149.1 35.5 38.4 77.6 40 35.5 50 40 55 9 18 7 50 65 AC50B-D 3/4, 1 1/8 186.2 220.1 43 93.1 30 45 70 50 70 11 20 8 60 80 AC60B-D 1 1/8 196.2 234.1 45 98.1 30

MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Base Mounted Type SY3000/5000/7000/9000 < >: Values with surge voltage suppressor 3 position closed centre/exhaust centre/pressure centre Grommet (G), (H): SY7 40(R)-Q 02 03 3 4 5 Scale: 35% G H SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ L type plug connector (L): SY7 40(R)-L-Q M type plug connector (M): SY7 40(R)-M-Q DIN terminal (D): SY7 40(R)-D-Q 02 03 3 4 5 3 4 5 02 03 02 03 3 4 5 VQ4

LEC-OM02704CN

145 14.3.2 146 14.3.3 147 14.3.4 147 14.3.5 147 14.3.6 148 14.3.7 148 14.3.8 149 14.4 14-10 14.4.1 14-10 14.4.2 14-15 14.5 14-18 14.5.1 14-18 14.5.2 14-20 14.5.3 14-21 14.5.4 (DIO) 14-24 14.5.5 ON/OFF 14-29 14.5.6 (DIO) 14-31 14.5.7 1ON/OFF() 14-32 14.5.8 14-33 14.5.9 14-40 14.5.10 14-41 14.5.11 14-42 14.5.12 14-48 14.5.13 14-49 15 15115-112

MY1

10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NH VV VV XX Z XX Z NH 27.7 10 30 160 28 56 40 40 3.5 153 7.5 48 9 11 2.5 15 14 68 13 33.7 12.5 32 200 34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX

AC Servo Motor Driver (CC-Link Type ）

/enable of I/O devices (DIO) . 14-31 14.5.7 Input devices ON/OFF (test operation) . 14-32 14.5.8 Test operation mode . 14-33 14.5.9 Alarm history . 14-39 14.5.10 Current alarm . 14-40 14.5.11 Point table . 14-41 14.5.12 Driver group designation . 14-47 14.5.13 Other commands . 14-48 15.

AC Servo Motor Driver (CC-Link Type ）

/enable of I/O devices (DIO) . 14-32 14.5.7 Input devices ON/OFF (test operation) . 14-33 14.5.8 Test operation mode . 14-34 14.5.9 Alarm history . 14-40 14.5.10 Current alarm . 14-41 14.5.11 Point table . 14-42 14.5.12 Driver group designation . 14-48 14.5.13 Other commands . 14-49 15.