VFR

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

AS-FG/ASD-FG

AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

IIIIIII

4 8 7 (123 7) 1 5 7 (40) 1 3 0 (33) 0.87 t22\ o.2a (71 o.7E fi9) o.12 (3) 0.4I ( 1 1 ) Millimeters in Parentheses NvFl,l25GN02-08 NVFil250-N020 F O F 4.63 lbs. (2 1 Ksl P T 0.17 in (4.4 mm) or. 0.08 in (2.0 mm) T.T O 25 in 18.4 mm\ '7s PSIG (s Ksqqlq1 tu.F. 3.31 lbs (1.5 Ks) T f 40" '75 PSIG (5 Kgf/cm2) ' May be rotated without changing porl localion A B c D E F u H K M N A B D E F G H '

Mechanical Valves Series NVM, NVFM, NVZNI

4 8 7 (123 7) 1 5 7 (40) 1 3 0 (33) 0.87 t22\ o.2a (71 o.7E fi9) o.12 (3) 0.4I ( 1 1 ) Millimeters in Parentheses NvFl,l25GN02-08 NVFil250-N020 F O F 4.63 lbs. (2 1 Ksl P T 0.17 in (4.4 mm) or. 0.08 in (2.0 mm) T.T O 25 in 18.4 mm\ '7s PSIG (s Ksqqlq1 tu.F. 3.31 lbs (1.5 Ks) T f 40" '75 PSIG (5 Kgf/cm2) ' May be rotated without changing porl localion A B c D E F u H K M N A B D E F G H '

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

39.6 18.5 18.3 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 16 32 16.2 10.9 AS231FG-02-10 AS231FG-N02-05 31 47.9 42.1 21 20.2 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 29.4 34.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Base Mounted Type SY3000/5000/7000/9000 < >: Values with surge voltage suppressor 3 position closed centre/exhaust centre/pressure centre Grommet (G), (H): SY7 40(R)-Q 02 03 3 4 5 Scale: 35% G H SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ L type plug connector (L): SY7 40(R)-L-Q M type plug connector (M): SY7 40(R)-M-Q DIN terminal (D): SY7 40(R)-D-Q 02 03 3 4 5 3 4 5 02 03 02 03 3 4 5 VQ4

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Compact Cylinder

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

NCQ2/CQ2

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

CQ2

(Example) For bore size 40 Part No. A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 3 39.4 20.1 KPGR04-06 KPQR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPGR04-08 KPQR04-08 8 20.8 4 42.5 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 5 21.2 45 KPQR06-10 KPGR06-10 Applicable fitting size d 10 5 47 23.2 KPGR08-10 KPQR08-10 8 15.2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

reduces flow setting time

(S) 8 13.2 10.2 16.4 30.1 21.5 40 14.2 16 AS231FS1-02-04 (S) 4 7.2 9.6 12 1/8 13 (12.7) ASN AQ 24 AS231FS1-02-06 (S) 6 11.2 19 33.8 21.4 43.9 14.2 26 AS231FS1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FS1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 ASV 49 AS331FS1-02-08 (S) 8 13.2 37.1

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

38 (39) AS321FSG-03-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-03-10 (S) 10 15.9 26.7 37 28 15.6 39 (40) AS321FSG-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FSG-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS421FSG-04-16 (S) 16 23.8 34.8 47.7 (47.6) 32.7 20.6 68 (

ARM10/11

60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR