Fluoropolymer Piping Equipment

24 24 9 18 21 21 43 43 28 28 17 26 44 44 54 23 23 39 3.6 LQ1T41-R12 6 12 12 29 26 54 39 3.6 LQ1T41-R22 10 6 12 6 24 20 24 9 18 21 21 43 38.5 43 28 23 28 3.6 LQ1T41-R23 6 6 12 7 20 29 14 28 17 26 44 44 54 23 39 3.6 LQ1T41-R26 12 3 12 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T41-R32 6 12 6 15 24 15 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T41-R34 3 12 3 1.8 LQ1T51-R2 19 10 19 7 29 20

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12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 04 No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

Table of Contents

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Gasket SY5000-11-18 SY9000-11-2 o SY7000-11-14 SY3000-11-25 For valve mounting (Matt nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV3000-21-1 (M4 x 35) SX3000-22-2 (M2 x 24) SV2000-21-2 (M3 x 40) Note) Round head combination screw requires 2 pcs. per one valve for Series SV1000, SV2000, SV3000.

Air Cylinder Series CA2

71 13 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 Up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 367.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

CV/MVGQ

Made to Order Specifications (For details, refer to page 10-21-1.)

CV/MVGQ

Made to Order Specifications (For details, refer to page 10-21-1.)

Plug-in/Plug Lead: Single Unit

03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug llead type Individual EXH spacer 03 04 03 04 VVQ5000-R-1(Plug-in

HRX-OM-Q026

When the ambient Continuous monitoring temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

ASR

18.5 35.9 58.7 18.5 8 45.6 50.6 45.6 23 44.6 39.6 16.8 82 105 21 31 53.8 10 127 150 17 36.5 62.9 6 130 153 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(S)A 4 8.2 13.9 25.1 10 (10) AS23l1FG-01-06(S)A 6 10.4 26.2 20.4 38.8 AS23l1FG-01-08(S)A 8 13.2 10.2 16.4 30.1 21.5 40 14.2 12 (11) AS23l1FG-02-04(S)A 4 7.2 9.6 12 ASP 1/8 13 (12.7) ASN 36.6 35 31.1 29.5 13.3 18 (19) AS23l1FG-02-06(S)A 6 11.2 19 33.8 (33.9) 21.4 43.9 20 (21) AS23l1FG-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6

44

17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

F

16.2 11 22.5 15.5 6 29.6 AS221F-U01-06 16.5 15.2 25.3 18.5 8 32.4 AS221F-U01-08 19 18.5 33.1 21 10 15 40.2 AS221F-U01-10 20.9 17 8.9 23.3 14.5 1/4 4 18.5 17.2 32.5 AS221F-U02-04 31.1 32 26.6 39.4 34.4 11 23.9 15.5 6 33.1 AS221F-U02-06 31.3 15.2 27.2 18.5 8 36.4 AS221F-U02-08 33.6 18.5 33.9 21 10 19 43.2 AS221F-U02-10 35.5 19 11 26.4 15.5 3/8 6 23 19.4 37.9 AS321F-U03-06 52.5 37.6 32.6 45

Vacuum

5 30.5 16.5 34 24 21-5 81 25,6 23 21,7 1 2 13.5 lnch Slz zFB100-04 ,t8 26 2.5 12.5 21 17,5 t5 50 15.5't4-4 12.4 4 zFB100-06 6 zFB200-06 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 6 15.29-5 zFB200-08 zFB300-08 57 30 27 14.529.5 21 1 7 2t.s 16 I i11 '10 zFB300-10 ifltl Size 80 tw0-G0l0n single ouput digital $wtich [night LE0 dual-output diffial switch Solid State Vacuu m Pressure Switches Specifi

VFS

03 04 q Description No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Table 5.10 Selectable input devices Setting Input device (Note 1) value P S T 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP LSP (Note 3) 0B LSN LSN LSN (Note 3) 0D CDP CDP 0E CLD 0F MECR 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP (Note 2) LOP (Note 2) LOP (Note 2) 24 CM1 25 CM2 26 STAB2 STAB2 Note 1.

Vacuum

5 30.5 16.5 34 24 21-5 81 25,6 23 21,7 1 2 13.5 lnch Slz zFB100-04 ,t8 26 2.5 12.5 21 17,5 t5 50 15.5't4-4 12.4 4 zFB100-06 6 zFB200-06 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 6 15.29-5 zFB200-08 zFB300-08 57 30 27 14.529.5 21 1 7 2t.s 16 I i11 '10 zFB300-10 ifltl Size 80 tw0-G0l0n single ouput digital $wtich [night LE0 dual-output diffial switch Solid State Vacuu m Pressure Switches Specifi