• :'11 \ooOD I . ., 1 ;' Nlodo6 ~~ " BK; :t.laXQ7 E :MijXOB y P.;pglicable tube, 0.0 G H 1>1;1 <0 . El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...)
Note 1) In the case of ZCUKD16-5D: 14.5 mm. 26 14 4.5 4 2 12 30 (40) 19.5 7.6 depth 6.5 3.5 15.5 75.5 (85.5) 5 29 33 42 16 20 24 6 8 10 5.5 5.5 6.6 9 9 13.5 4.5 4.5 4.5 16 20 24 36 (46) 40 (50) 42 (52) 21 21 22 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 5 5 19.5 24.5 30.5 86 (96) 94 (104) 106 (116) 1258 Free Mount Cylinder for Vacuum Series ZCUK Vacuum Piping: Rod Piping/Rod End Shape: Male
25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 5, 10 Double Clevis Without auto switch With auto switch A 40.5 41.5 51 57.5
11 13 37.5 42.5 25 25 22 27 49.5 (55) 3 A VXD2 27 108 77 47.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 148 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet 300 U E C (42) 40 VX2
10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.
38.5 41.5 37.5 32 13.5 5.5 14 6 11 3 18 10 19 11 50 41 42 48 44.5 47.5 43.5 40 18 8 18.5 8.5 15.5 5.5 22.5 12.5 23.5 13.5 63 47.5 48.5 54.5 51 54 50 50 18 13.5 18.5 14 15.5 11 22.5 18 23.5 19 80 57.5 58.5 64.5 61 64 60 63 20.5 16.5 21 17 18 14 25 21 26 22 100 67.5 68.5 74.5 71 74 70 80 25.5 20 26 20.5 23 17.5 30 24.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 36.5 30.5 37.5 31.5 14 Series RQ
SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not
Refer to pages starting with 42 for mounting. Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.3 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)
Description Material Note 1 2 3 4 5 6 7 8 9 10 11 No.
M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 176 63 to 600 109 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 131 110 10 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets and plug bolts are installed before shipment
10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 89 Series CRBU2 Dimensions: 10 Double vane type Figures below show the intermediate rotation position when A or B port is pressurized.
Teflon is a registered trademark of DuPont. 4.2-42
85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130
21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2
21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2
38.5 41.5 37.5 13.5 5.5 14 6 11 3 19 11 50 40 41 42 48 44.5 47.5 43.5 18 8 18.5 8.5 15.5 5.5 23.5 13.5 63 50 47.5 48.5 54.5 51 54 50 18 13.5 18.5 14 15.5 11 23.5 19 80 63 57.5 58.5 64.5 61 64 60 20.5 16.5 21 17 18 14 26 22 100 80 67.5 68.5 74.5 71 74 70 25.5 20 26 20.5 23 17.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 37.5 31.5 7-7-17 17 Series RQ Operation Range 100 Switch model Bore size (
Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.
L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201
Removal of drainage Flush drainage from filters regularly. 17-5-42
Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.