LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Compact Manifold Regulator Series ARM5

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5N (Base Mounted M5X0.8 NPT)

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: Base Mounted M5X0.8 NPT

High Purity Chemical Valve

Symbol 03 04 05 06 07 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Body class Note) Options can not be combined each other. 3, 1/8" Double acting 4 3/16" Material 2 Body type 6 1/4" Actuator section Applicable option Diaphragm PTFE Symbol Note Body A Stacking type for manifold End plate PPS 1 4 6 1/4" Nil PFA Hydrofluoric acid compatible PTFE F PVDF PFA 3 8 10 3/8" Ammonium hydroxide

Air cylinder (Series compatible with secondary batteries)

Grease pack part number: GR-D-005 (5g), GR-D-010 (10g), G-D-100 (100g) Table 13 Wear ring Wear ring number 40 C2A40-07-305B 50 C2A50-07-305B 63 C2A63-07-305B 80 C2A80-07-305B 100 C2AA0-07-305B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

5-Port Solenoid Valve

p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53 p.

KP/KPQ/KPG

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

V

1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I

VZ3000

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

KG

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Manifold Specifications

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ARM10/11

/min(ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure

ARM10/11

/min(ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

18.5 29.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8