Air Cylinder

Bore size A1 H MM ZZ 20 8 10 M4 x 0.7 86 25 8 10 M5 x 0.8 86 32 12 10 M6 x 1 88 40 13 10 M8 x 1.25 114 H ZZ + Stroke (mm) DBore size Stroke range A AL B1 F FF FX GA GB H H1 I KB MM N ND P S ZZ 20 1 to 150 18 15.5 13 30.4 M5 x 0.8 depth 9 22 22 8 27 5 28 8.2 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 10.2 M10 x 1.25 30 26 0 0.033 1/8 76

15

x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NW M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NV M4 x 0.7 8 63 40 3.3 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NU M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NT M5 x 0.8 8.5 70 50 3.3 60 60

Air Cylinder

[mm] Bore size A B C D F GA GB H MM NA NB NDh8 NN WA WB WW S Z 10 15 15 17 4 8 7.5 6.5 28 M4 x 0.7 21 18 8 0 0.022 M8 x 1.0 14.4 13.5 45 63 91 16 15 18.3 20 5 8 7.5 6.5 28 M5 x 0.8 21 18 10 0 0.022 M10 x 1.0 14.4 13.5 45 64 92 Double-side Bossed (E) Stroke CJ2ZE 10 16 Z NDh8 NDh8 Section Y detail WA WB Mounting nut Y Rod end nut GB NN YY Section YY detail GA WW NDh8 Piping port 2 x M5 x

Possible to transfer a workpiece at low-speed.

Q1 = M D1 = Y = C1 = C L2 = Q2 = M C1 L1 = X = L1 = X = (mm) (mm) (mm) D1 X 9 to 18 10 to 20 L2 max Y 2 Y 3 Y 7 to 9 8 to 10 Q2 M5 M6 L1 max X 4 X 4 Q1 M5 M6 X 3 to 18 3 to 20 L1 max X 2 X 2 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 Symbol: A7 Symbol: A8 Symbol: A6 The short shaft can be further shortened by machining it into a stepped round shaft.

MY1

M5 x 0.8 GB 16.2 20 G 13.5 12.5 NC 14 17 WW 13 14 VV 10 12.5 PP 7.5 11.5 XX 30 32 QQ 9 10 RR 11 14.5 TT 15 18 UU 14 12 SS 2.5 5 Model MY1M16G MY1M20G "P" indicates cylinder supply ports.

Rotary Actuator

4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42 29 10 20 4.5 1.5 7 10 0.5 20 13 36 M5 24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10

Stability of suction position,

M12 x 1.75 Width across flats 22 18 M12 x 1.75 11 Width across flats 22 6 11 52.5 61.5 94.5 27 85 27 52 43 6 78.6 32 32 61 53.61) 22 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 106 100 71.5 85 80 57 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-TF80BMl-B12 213 208 248 ZP3E-TF100BMl-B12 321 310 393 ZP3E-TF125BMl-B12 26 18 M12 x 1.75 11

Modular F.R.L. Units

18 18 18 18 18 18 ZA17 Digital pressure switch: With unit selection function 19 19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

KP/KPQ/KPG

-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 D1 4 4 4 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

Air Slide Table

M10 x 1 M5 x 18 15 12 14 35.5 33.5 5 17 MXQR-CT16-X11 33 F A 25 MXQR-CT16-X12 43 (C) MXQR-CT20 5 27 MXQR20 MXQR-CT20-X11 M5 x 18 15 13 37 17 44.5 41 6 18 M12 x 1.25 MXQR-CT20-X12 25 47 MXQR-CT25 5 30 MXQR25 M6 x 22 MXQR-CT25-X11 M14 x 1.5 15 40 15 19 53.5 49 6 21 MXQR-CT25-X12 25 50 1) Size of hexagon socket head bolt 2) Mounting the adjuster on the left side is also available.

SYJ300/500/700

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 4-4-29 30 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch

Vacuum Module Series ZX

(or M6) Plug (1) 19 13.6 ZQ Pressure sensor Vacuum switch (ZSE2) ZH Vacuum port (V) M5 (or M6) Filter unit (F) ZU Filter + O ZL Air pressure SUP port (P) M5 (or M6) 2 x 3.3 (Mounting hole) 59.5 50 ZY 63.5 57.6 10.2 PD 6.5 ZF 4 18 P 18 6 V ZP 4.2 17.6 10 10 Bracket A (ZX1-OBA) (Standard accessory) 57.1 54.6 SP ZCUK Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

0.

-PR M5 x 0.8 (X: External pilot port) M5 x 0.8 [1(P), 3(R) port] M5 x 0.8 [2(A) port] 1 P 3 R 10 10.7 9 32 30.2 Note) For one-touch fittings for P/R port and silencer part no., refer to back page 4.

Stainless Steel 316

(mm) Connection thread R M Weight (g) A D L D Applicable tubing KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S 22.3 19.3 4 7.4 M5 x 0.8 4 10 10 18 1/8 24 20 5.6 9.4 M A L 24.1 21.1 4 11 M5 x 0.8 H 12 6 12 24.3 1/8 20.3 18.8 11 10.4 Connection thread 25.8 1/4 19.8 18 14 1/8 30.5 26.5 18 (In case of R) 8 1/4

V

-04 4 M5x0.8 8 9.5 9.6 22.8 27.6 11.1 31.4 28.6 27.7 24.9 13 8 ASV220F-M5-06 6 M5x0.8 8 11.5 9.6 23.9 28.7 11.1 31.4 28.6 27.7 24.9 14 9 * Assembled height (N)ASV 0 F B O D Y S I Z E 1 M3 2 M5 3 18 4 14 5 38 D I M E N S I O N S S E R I E S (N)ASV T E E T Y P E S Y M B O L S W I T H B U I LTI N S I L E N C E R B O D Y T Y P E 1 Tee 2 Elbow P O R T T H R E A D M3 M3x0.5 M5 M5x0.8 01 1/8

Table of Contents

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

LJ1H

Without brake 18 85 Mitsubishi Electric Corporation With brake 3.2 Yaskawa Electric Corporation Cable length 18 5m 05 Applicable cables LJ1 (non-standard motor), LXP/LXS (AC servomotor) 35 Model Manufacturer part no. 16 MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LJ1-1-G051 4.5 101 110 18 MFECA0050FAB (for motor) MFMCA0050AEB (for encoder) MFMCB0050CET (for brake) LJ1-1-G05B LJ1-7

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60