Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 16 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 12 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

3 Port Solenoid Valve Metal Seal Series VZ200 1

2 Pilot valve assembly SCZ2-NBR VQ VKF VQZ VZ VS VFN 4-15-3 4 Series VZ200 Construction (Sub-plate mounted) N.C. (VZ215) N.O.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PD port specification PV port location when the V port is viewed in front Right side Left side 5 Without PD port With PD port Ejector body gasket for manifold ZQ-3-005-10AS Note 2) Note 1) Refer to pages 15 and 16 for detailed description of How to Order. Note 2) 10 pcs. are included in one set.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

When a number is necessary for the connector assembly mark tube, suffix the number to the part no.0 to 15 are provided as mark tube numbers. Ex)+COM spec..

ARM10/11

C4 4 Option Air -5 to 60C Fluid AF C6 6 Nil None Ambient and fluid temperature N3 5/32 X17 Oil-free 3%F.S.

ARM10/11

C4 4 Option Air -5 to 60C Fluid AF C6 6 Nil None Ambient and fluid temperature N3 5/32 X17 Oil-free 3%F.S.

Compact Manifold Regulator

H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 744 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Table of Contents

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

CRB2/CRBU2/CRB1

Port size for CRB2BW10, 15 is M3.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

VQC

A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Plug-in Unit

A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting