Nozzle Type Ionizer

92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103) 16 92.5 5 5.5 Variable nozzle direction 12 46 18.5 Air blow port 8 4 22 IZN10E Series Made to Order 2 This product is an individually applicable product.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

It is calculated using the following formula. 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 Part no. Y-MU02 Y-MU03 Y-MU04 Y-MU05 Part no. I-MU02 I-MU03 I-MU04 I-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 MLGP RLQ Knuckle pin and snap ring are included.

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

Parallel Type Air Gripper Series MHZ

Note: 1g = 0.0353oz Options Body options/End boss type Single acting type, normally closed Symbol Piping port position Applicable model Double acting Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Single acting Standard Side ported Nil E K H M Axial port 2 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Construction/Standard

S070

Material Number Gasket 10 SS070M-80A-1 FKM Clip 10 SS070M-80A-2 Stainless steel 4-11-16 17 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.

3

Chromium molybdenum steel Stainless steel NBR Carbon tool steel Phosphor bronze Stainless steel Rolled steel Carbon tool steel Hexagon socket head set screw Guide pin O-ring Chromium molybdenum steel Rolled steel Rolled steel Round R-type retaining ring Coil scraper Scraper pressure Head cover C-type retaining ring Except 12, 16 Except 12, 16 Except 12, 16 Electroless nickel plated 20 to

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Maximum of 16 stations for SI type.

Refrigerated Air Dryer

x 0.93 x 1 x 0.88) = 0.51 m3/min 3 Selecting a model According to the corrected air flow capacity of 0.43 m3/min, IDF4E will be selected which air flow capacity is 0.52 m3/min at 50 Hz.

Support Guide/11-LEFG Series

12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL

SMC Pneumatic Clean Series

Proper auto switch mounting position (Detection at stroke end) D-C73 Auto switch 8.5 16 Approx. Hs A 26 B D-H7A1/H7B Auto switch 8.5 16 Approx.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

CUJ

CUJB10-4 -6 -8 -10 -15 -20 M2.5 x 21L M2.5 x 23L M2.5 x 25L M2.5 x 27L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L 4 4 14 M2.5 x 14L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 5 5 18 M3 x 18L For axial mounting With Auto Switch For side mounting A B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33

Prevents Micro-Bubbles

Note 1) (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

SV

to 16 solenoids possible.)

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

, B , C ) 27 2.5 2 3-R1.5 2-4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2-4.5 through 3-R1.5 2-M3 x 0.5 1 5 Adjustment: Max. 7.5 0.5 B port A port +0.025 0 3-3H9 long groove depth 2.5 4g6 0.004 0.012 ( A , B , C ) 9h9 0 0.036 29 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 0 0.062 36h9 Top ported: MSUA1-SE A port B port 9.5 2-M3 x 0.5 8.5 11