SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Vacuum Module Series ZX

Release valve Release valve Pilot pressure EXH port (PE) M3 Manual override Release flow rate adjusting needle Interface plate Pilot pressure EXH port (PE) M3 70 Release flow rate adjusting needle Interface plate A 83.9 35.4 A 35.4 Pilot pressure SUP port (PS) M3 (Mounting hole) 2 x 3 1 Pilot pressure SUP port (PS) M3 5.4 1 (Mounting hole) 2 x 3 5.4 Vacuum pressure SUP port (PV) M5 (or M6

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

2-Color Display Digital Flow Switch Series PFM

Power supply / Output connector (2 m) ZS-28-A D Bracket With M3 x 5 l (2 pcs.) ZS-28-B Mounting screw (M3 x 8 l) Sensor connector 1 pc. ZS-28-C-1 Panel mount adapter With M3 x 8 l (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8 l (2 pcs.)

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Compressed Air Preparation Filter

Drain 13 Compressed Air Preparation Filter AFF/AM/AMD Series Construction: AFF, AM, AMD Bowl Assembly/Part Nos.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.

IDX-OM-W011

) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( )

MHZ2/MHZJ2

0 2H9 depth 3 4-M3 x 0.5 thread depth 5.5 (mounting thread) 0.02 5.2 Prepared hole dia. 2.6 through (mounting hole) Note) +2.2 0 0 -0.1 4 16 29 23 18 7.6 0.02 11H9 depth 2 +0.043 0 0 -0.7 23 12 When closed 11.2 When open 15.2 16.4 0.05 37.8 6 12 2-M3 x 0.5 thread depth 6 (mounting thread) 57 M3 x 0.5 4-M2.5 x 0.45 (finger closing port) (attachment mounting thread) M3 x 0.5 (finger opening

48

1/8" 7.2 17.2 21.7 16.9 5 AS121F-M3-03A-X790 5/32" 8.2 M3 x 0.5 8 9.4 26.5 25.4 23.5 22.4 1 Reference dimensions 2 Reference dimensions of threads after installation 13 JMGP Series Specific Product Precautions 1 Be sure to read this before handling the products.

Wedge Cam Operation Provides

X 0.5 thread depth 4 (Mounting thread) 15 3H9 depth 3 +0.025 0 2-M3 X 0.5 thread depth 6 (Mounting thread) 4-M4 X 0.7 thread depth 8 (Mounting thread) 13H9 1.5 deep +0.043 0 0 -0.1 Bottom hole dia. 3.4 through (Mounting hole) 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 depth +0.025 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Thread

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SYJ7000-16-2 A Round head combination screw M3 x 47 Matt nickel plated (with spring washer) Gasket DXT199-21-13 ARBYJ7000-00-P Thread type SYJ7000-21-3A Round head combination screw M3 x 55 Matt nickel plated (with spring washer) Nil F N T Rc G NPT NPTF Round head combination screw M3 x 8 Matt nickel plated (with spring washer) A B Blanking plate SYJ7000-21-1 Gasket DXT199-21-13 Base mounted

Rotary Table/Vane Style Series MSU

MSUB1 (Single vane) MSUB1-S/SE 4 x M3 x 0.5 depth 5 2 x 4.5 through 2 x M4 x 0.7 depth 8 Long groove depth 5 (Positioning pin hole) 2 x 4.5 through +0.025 0 3 x 3H9 depth 5 Adjustment bolt 2 x 4.5 through Adjustment: Max. 5.75 A port B port 2 x M3 x 0.5 2 x M4 x 0.7 depth 8 Top ported: MSUB1-SE A port B port 2 x M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

Clamp Cylinder with Lock

Round head Phillips screw (M3 tightening torque: 0.5 to 0.7 Nm) Spring washer Mounting bracket part no.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

x 0.5 thread depth 4 (Mounting thread) 15 3H9 depth 3 + 0.025 0 13H9 depth 1.5 + 0.043 0 2 x M3 x 0.5 thread depth 6 (Mounting thread) 4 x M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 5 0 0.1 4 8 32.6 28 34 20 3 0 0.2 Open 13 + 1.2 0 10 0.02 10 0.02 Closed 9 22 3H9 depth 3 + 0.025 0 15 31 13 63 20 0.05 Auto Switch Mounting Groove Dimensions 4 x M3

17

m3 1.

Flow Control Equipment

Universal mounting Model Size (nominal X height) Piece Metric Inch TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 X 15 M3 X 20 1 M4 X 25 TMH-08 TMH-10 TMH-12 M4 X 35 The holder can be used to secure an individual part.

7

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override