Series VCL

44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 Option Port size M5 x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low

VM

Twist selector (3 position) VM131-01-35R/B/G/Y VM151-01-35R/B/G/Y Panel mounting hole JIS Symbol 3 port 5 port R port (3 port only) 0.5 MPa supply 15 N F.O.F. 45 T.T. 5-6-16 15 2/3 Port Mechanical Valve Series VM100 Series VM100/Bottom Ported JIS Symbol 2 port Basic VM122-M5-00 VM132-M5-00 VM123-M5-00 VM133-M5-00 Actuator mounting hole 2-M5 x 0.8 depth 4 3 port R port (3 port only) SA 0.5

HRX-OM-S004

HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet . 8-19 Chapter 9 Product Warranty

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 15 4-M4 x 0.7 4-M3 x 0.5, depth 4 Bottom hole diameter 3.3 20 0.05 W (Plug: M-5P) D B 8 0.05 28 Piping port 2-M5 x 0.8 10 J 6 10 9.5 Across AA Mounting base side B D MXP10-20B Max. 15 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 2.5 L 4.7 6-M3 x 0.5, depth 4 15 15 (mm) Model H N J K L M S V W Z MA MXP10-10B 32 6.5

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-45 4 Series AS-FG Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 Meter-in type M5 type U10/32 type AS3311FG-02 Component Parts No.

VFS

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

42

B 2 A 4 A B 3 A B 2 A 4 A B 2 A B 2 A 4 A 1 A 68.5 46 34.5 X 12 Stations D side 15.5 17 22 51 69 117 Lead wire length (600 or 1500 mm) 194.5 (Single, Double, 3-position, Rubber seal type) 200 (3-position, Metal seal type) 1/8" External pilot port 520 Base Mounted Plug Lead Unit VQ5000 Series Bottom ported drawing SV SYJ 106 15 83.5 SZ 55.5 M5 x 0.8 Ground screw 9 9 1/2" 4(A), 2(B) port VF

MHF2

52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Groove for auto switch mounting 20 43 2.2 2-3H9 +0.025 0 depth 3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch

ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

0.39 0.45 0.46 0.48 0.47 0.66 1.1 1.2 0.14 0.18 0.32 0.33 0.45 0.45 0.41 0.37 47 51 M5 x 0.8 46 68 N.O.

MXU

0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

(Refer to the figure below.) 0.061 0.053 0.062 34 20 0.076 0.066 0.074 38.5 25 0.076 0.066 0.074 41 30 0.047 0.041 0.109 28.5 5 0.047 0.041 0.109 31 10 0.080 0.069 0.169 36 15 MXU10 9.5 0.080 0.069 0.169 38.5 20 0.103 0.089 0.212 44 25 0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25