Silencer Series AN

01 02 03 04 05 10 15 20 30 40 M5 x 0.8 M thread 1/8 Nil R 1/4 N NPT 3/8 1/2 Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) Noise reduction 30 dB(A) Note 2) Ambient and fluid temperature 41 to 140F (5 to 60C) Note 3) Note 1) It indicates the inlet pressure for solenoid valve.

Electric Grippers

Make sure a workpiece mounted on the fingers does not interfere with the workpieces and facilities around the fingers. 63 When closed: +0.3 0.5 19 When opened: +0.3 0.5 33 6 2 x M6 x 1.0 x 10 2 x 5.2 through 12 0 0.05 10 0 0.1 (Finger operating range: 19 to 34.5) Note) 4 x M5 x 0.8 20 Reference position of the gripping point 38 12 Series LEHZ Dimensions LEHZ32K2-22 Motor cable entry: Entry

TABLE OF CONTENTS

10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G 120 60 58 3 AF 16 P Lead Wire 120 Volt Line A.C. 60 Hertz 3-Way Normally

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (24.5) (7.8) 23.4 mounting hole 41 Foot bracket For the bracket assembly model, refer to page 4-14-19.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41

MHF2

62 174 2-M6 x 1 thread depth 6 Mounting thread 33 144 E 13 25 25 30 41 E 4-5.2 through (mounting hole) 0 -0.1 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 +0.1 0 Close: 0 E-E Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8

Stability of suction position,

ZP3EU-F2-YAL14 [Weight: 78.4 g] M14 1 Width across flats 19 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 A-A A-A 5 5 25 55.6 30.6 11.2 5 5 25 30.6 55.6 19 19 A A A A 17 17 22 22 24.6 24.6 6.41) 9.5 9.5 11.2 2.5 2.5 6.41) Applicable pad part no.

REC

Refer to p.1.4-19 and 1.4-20.

ZP

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

CLQ

x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l 80 85 90 95 100 105 110 115 120 155 180

Soft Start-up Valve

With built-in silence K L M N P Q R S T U V W X Y AVL2000-02-5 to 6WOZ--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVL3000-03-5 to 6WOZ--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVL4000-04-5 to 6WOZ--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AVL5000-06,10-5 to 6WOZ--A 70 75 70

Environment

x 0.8 8 37 38 15.4 8.2 28 0.9 15.9 146 196 24.5 101 to 400 32 20 to 100 40 M6 x 1.0 10 37 38 15.4 8.2 28 1 15.9 151 201 27 101 to 500 [mm] Body Bottom Tapped Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

CNG

52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162

Cylinder with Lock Series CNG

52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13