)1.8 (at 20C)?

)3.0 (at 20C)?

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

)1.25 (at 20C)?

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Low Profile

D-G

Table of Contents

D-C73/D-C76/D-C80 Band Mounting Style. D-B53/D-B54/D-B64 Band Mounting Style . D-C73C/D-C80C Band Mounting Style. D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. D-E73A/D-E76A/D-E80A Direct Mounting Style. 2-color Indication Type .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

Electric Actuators

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Table of Contents

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Table of Contents

D. Applicable tube O. D.

KJ

L1 L2 M D I.D.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

A

pressure 0.5MPa Number of DROPS 5 drops/min ISOVG32, 20C Max Flow Data @0.5Mpa Supply 0.03MPa Pressure Drop 1000 M5 2000 18 14 3000 14 38 4000 38 12 5000 341 6000 1 A C C E S S O R I E S W/O Bracket B With Bracket P O R T S I Z E M5 M5 01 18 02 14 03 38 04 12 06 34 10 1 P O R T T H R E A D D I M E N S I O N S NAL1000NAL2000 D I M E N S I O N S NAL3000NAL4000 D I M E N S I O N S NAL5000NAL6000

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

Best Pneumatics Vol. 14

Accessory Optional specifications D Float type auto-drain (N.O.)

Modular F.R.L. Unit

Accessory Optional specifications D Float type auto drain (N.O.)