OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VFA3000

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

I

IR3010 IR3020/3120 Bracket P36201023 P36202028 P36203018 Pressure Gauge G33-2-01 G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

02 03 SY Type of actuation SYJ (A) 2 N.C.

AN

ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing