VHK

26.2 36 18.7 31 58 17 9.7 7.2 VHKl-02S-06F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17

Table of Contents

167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41 1 Please refer to pages 14-20-62 to 64 for specific product precautions.

CY1

M8 x 1.25 15 159 48 30 42 60 41 10 50 113 176 82 CY1RG63 118 8.6 10 M8 x 1.25 16 171 60 32 48 70 47 10 60 121 188 94 With auto switch CY1RG Bore size .

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Bore size 8-15-41 41 Series CY1R Standard Type: 6, 10, 50, 63 CY1R Bore size H Stroke L N Nil Note 1) Type L is not available for 6 through 10. Note 2) The dimensions shows the one with switch rail (Nil). W K HT HB HC N X A 2-Plug 4-Counterbore dia.

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6 [39.8] 47.4 [49.6] 39.1 46.5 Refer to the page 91 for dimentions with connector cable. 10 Series SYJ3000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Type 31, S31 Type 32, S32 Type 41, S41 Type 46, S46 Model

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6 [39.8] 47.4 [49.6] 39.1

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

REC

X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150

LEY-OM007

50 60 [mm] bCW 50mm 0 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 10 50mm CCW CW -40 -30 -20 -10 0 10 [mm] -10 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -33- LEC []/ LEC 12: CCW 1: CW 2: CCW 1 LEY*16**:100LEY*25**:100LEY*32**:100 LEY*16*A*150LEY*25*A*200 100 20 550 / LEY16* 535 / LEY25* 530 / LEY32* 1000 () 10 0 CCW CW / P.37 6.1 1 CCW CW 2 3 OFF ON -34- 5. / A

SQ1000/2000

B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

10

11 27 31.2 26 NT-08 80 M22 x 1.5 13 32 37.0 31 NT-10 100 M26 x 1.5 16 41 47.3 39 NT-12M 125 M27 x 2 16 41 47.3 39 CJ2 JCM Note 1) Split pins and flat washers are included.

3 Port Air Operated Valve

-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

MXQ

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ6-20 MXQ6-20 0.010 0.02 MXQ6-20 MXQ6-20 MXQ6-40 MXQ6-40 0.03 MXQ6-40 MXQ6-40 0.02 MXQ6-10 MXQ6-10 0.01 0.005 MXQ6-10 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load (N) Load (N) Load (N) 8 8 8 Lr = 70 mm MXQ8-75 MXQ8-75 MXQ8-75 MXQ8-10 MXQ8-10 MXQ8-20 MXQ8-20 MXQ8-30 MXQ8-30 MXQ8

MGP

40 20 30 Load weight m (kg) Load weight m (kg) 32 2 3 4 5 25 20 16 10 5 4 16 2 3 1 1 0.2 0.3 0.4 0.5 0.5 0.2 0.3 0.4 0.1 10 100 0.1 10 100 20 30 40 200 50 50 200 20 30 40 Eccentric distance l (mm) Eccentric distance l (mm) Over 50 stroke Over 100 stroke P=0.5MPa 100 80 63 P=0.5MPa 20 100 25 50 Load weight m (kg) 10 Load weight m (kg) 40 32 20 5 25 4 10 16 20 3 16 2 1 10 100 1 10 100 200