Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

4/5 Port Air Operated Valve SYJA3000 Series

x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

Battery-less

1500 500 500 400 400 400 Positioning repeatability [mm] 0.015 0.08 0.02 0.02 0.01 0.05 0.05 Drive motor Step motor V V V V V V V 8 V 16 V V V V V 25 V V V V V V V Size 32 V V V V 40 V V V 8 2 (6) 16 15 (4) 1 35 (8) 35 (7.5) 8 (12) Max. work load [kg] The values in parentheses are for when mounted vertically. 25 30 (15) 10 70 (30) 70 (29) 12 (20) 5 (5) 12 (4) Size 32 50 (20) 19 80 (43) 80 (41

CHKD/CHKG

x 6 L CHN M3 x 6 L Auto switch (Attached to BHK2-032) (Attached to BHK2-032) CHM Auto switch mounting bracket BMG2-012 CHS Auto switch mounting bracket Auto switch mounting bracket BHK2-032 BHK2-032 CH2 CHA Related Products D1.

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2 MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the attached bolt for unlocking (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

MG

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

RLQ

Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market

RSQ

Note Applicable auto switch (N) Bore size (mm) 12 16 20 32 40, 50 Extended Compressed D-A7/A8 D-A7H D-A73C/A80C D-F7 D-F7V, D-F7NT D-F7W/J79W D-F7WV D-F79F D-J79/J79C D-F7BAL/F7BAVL Switch mounting screw (M3 x 0.5 x 8l) Square nut 9.6 3.9 16 20 BQ-1 14.9 4.9 14.9 3.4 Switch mounting nut Switch mounting screw (M3 x 0.5 x 10l) Switch spacer 18.6 8.8 32 40 50 27.5 13.7 BQ-2 Applicable

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

MHZ

MHW Option MRHQ Body Option/End Boss Type Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

MHZ

MHW Option MRHQ Body Option/End Boss Type Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

CRQ2

M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

CXS

x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (11) (5 + ST) 2.75 2-M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y

LJ1H

With brake: 148 Without brake: 118 Housing With brake: 135 Without brake: 105 29 24.6 Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.