5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Station Port size VV5FS2-01FD1 FU12With light/surge voltage suppressor Pilot EXH port Formula for manifold weight M = 0.178n + 0.378 (kg) Wiring specifications: Refer to page 1227. n: Stations 1(P), 3(R2), 5(R1) port 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 Stations Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L L1 L2 1151 Series VFS2000 Manifold Option

Clamp Cylinder Series CK1

CK1A40-75Y CK1A50-75Y CK1A63-75Y CKA-K075 69 59' 167 75 70 132 35 222 0 362 CK1A40-100Y CK1A50-100Y CK1A63-100Y CKA-K100 K 83 58' 177 75 90 142 45 232 0 397 CK1A40-150Y CK1A50-150Y CK1A63-150Y CKA-K150 108 55' 202 85 140 167 70 267 10 482 Note) The CK1B series (clevis width 19.5 mm) is not available with pedestal. 1328 Clamp Cylinder Series CK1 Auto Switch Proper Mounting Position (Detection

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Modular Type Air Filters Series AF

165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B B B AG AF10 AF20 AF30 AF40 AF40-06

Modular Type Regulators Series AR

W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G

7

CK1A40-75YZ CK1A50-75YZ CK1A63-75YZ CKA-K075 69 167 75 70 132 35 222 59' 0 360 365 360 CK1A40-100YZ CK1A50-100YZ CK1A63-100YZ CKA-K100 K 83 177 75 90 142 45 232 58' 0 395 CK1A40-150YZ CK1A50-150YZ CK1A63-150YZ DCKA-K150 108 202 85 140 167 70 267 55' 10 480 -X Note) Only available for the CK1A series (Clevis width 16.5 mm) 431 CK1 Series Auto Switch Mounting (Rod Mounting Type) Auto Switch

Filter Regulator

70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -45- 13-2.

CNG

3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 6.6 8 66 36 82 4 12 M6 x 1 Note) Dimensions inside ( ) are for long strokes. 8 Series CNG Dimensions Rear flange type (G): With rubber bumper/CNGGN GC GA Rc(PT) BP unlocking port Rc(PT)

Compact Cylinder

(mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQB5010 CVQB325 M6 x 60L M5 x 45L 60 45 15 10 x 60L x 45L 60 45 20 15 x 65L x 50L 65 50 25 20 x 70L x 55L 70 55 30 25 x 75L x 60L 75 60 35 30 12.5 x 80L x 65L 80 65 9 40 35 x 85L x 70L 85 70 45 40 x 90L x 75L 90 75 50 45 x 95L x 80L 95 80 75 50 x 120L x 85L 120 85 -100 75 x 145L x 110L 145 110 CVQB6310

CXS

The maximum piston speed for retraction is approximately 70% that of extension. MY Standard Stroke CY (mm) MG Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

CXS

The maximum piston speed for retraction is approximately 70% that of extension.

Floating Joint

70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 10 10 12 12 12 16 16 20 24 27 27 33 19

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

LVQ

42 84 48 96 75 145 25 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 150 42 84 48 96 75 154.5 32 60 88 10 7 20 50.8 38.5 45 137.5 LVQ60 available only as V. 524 Series LVQ Air Operated Type Integral Fitting Type With bypass Double acting valve N M LVQ2 1 2 LVC C A LVA B D SMC LVH LVD (Max.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Blanking plate assembly D side SX3000-75-1A Connector box mounting position 10-SS5Y3-45-AU-05D-C6 1 set (Type 45, 5-station manifold base part no.) SX3000-75-1A 1 set (Blanking plate assembly part no.) 10-SY3140-5LOU 2 sets (Single solenoid part no.) 10-SY3240-5LOU 2 sets (Double solenoid part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M3 x 30L x 35L x 40L x 45L x 50L

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CXT

(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor

Valve Single Unit

SX3000-75-2A SX5000-76-6A SX3000 SX5000 Note) When mounting blanking plate, be sure to mount a short cap. Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no.

Platform Cylinder Series CXT

(NA) (NA) Q + Stroke (mm) d Bore size (mm) Standard stroke (mm) A PA P Note) (N) (NA) PB PW Q E G GP H HG HN HP HT L F Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 1/8 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 1/8 90 140 190 159 CX2 PA dimension is the center sorted factor of the L dimension