Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

Refrigerated Air Dryers

VAC (50 Hz), 100/110 VAC (60 Hz) *5 Single-phase: 200 VAC (50 Hz), 200/220 VAC (60 Hz) Auto drain Single-phase 100 V 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 Single-phase 200 V Power consumption 50/60 Hz *6 [W] Electric specifications Single-phase 100 V 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 Refrigerant R407C (HFC) IDF F Operating current

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

A tube rod with a large bore which is 70% the piston diameter is used to withstand lateral load.

AC Servo Motor Driver

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 12 26 12.

IDX-OM-V024

Coefficient factors Inlet air temperature oF 80 90 100 110 120 130 140 149 oC 27 32 37.8 43 49 54 60 65 IDFB60 / IDFB70 1.33 1.21 1.00 0.78 0.61 0.48 0.38 0.28 IDFB80 / IDFB90 1.38 1.38 1.00 0.83 0.63 0.50 0.45 0.37 Inlet air pressure psi 50 60 70 80 90 100 120 140 145~232 MPa 0.35 0.41 0.48 0.55 0.62 0.69 0.83 0.97 1.00~1.60 IDFB60 / IDFB70 0.71 0.77 0.82 0.87 0.93 1.00 1.09 1.20 1.22 IDFB80

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

Rotary Table

On size 70, 100 and 200 the bearing cannot be removed as the bearing is press-fitted.

Water-cooledThermo-chiller

) 5 25 4 20 HRW015-H 3 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 15 2 HRW008-H 10 1 5 HRW002-H 0 10 20 30 40 50 60 70 80 90 0 0 10 20 30 40 50 60 70 80 Temperature difference t (C) (Circulating fluid temperature Facility water temperature) Circulating fluid temperature (C) When pump inverter is operating at frequency of 60 Hz (maximum).

A

Y40T 40 22 9 4 50 7 14 4.5 50 80 Y50T 40 22 9 4 50 7 14 4.5 50 80 Y60T 50 24 12 4 70 10 15 6 62.5 100 Courtesy of Steven Engineering, Inc. !

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

JXCx-OMX0009

Movement Speed Acceleration Deceleration force LV force position speed [mm/s2] [mm/s2] mode [mm/s] [mm] [mm] [mm] [%] [%] [mm/s] [%] [mm] 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 62 - Step Data

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70