Compact Guide Cylinder Series MGQ

MGF 100 B0.2 MGZ 80 63 100 MGT 50 40 A0.2 D By-pass port dia. 32 25 Load mass (kg) 10 20 16 A0.2 12 D(mm) MGQL 8 10 12 15 18 18 22 22 28 33 A (mm) B (mm) C (mm) Bore size (mm) Hexagon socket head cap screw MGQM 10 12 14 18 22 22 27 27 31 39 1 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 40 42 52 62 80 90 100 110

C92

Bore size (mm) Max. stroke Standard stroke (mm) MB1 32 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 CP95 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C92 100 1900 25, 50, 80, 100, 125,

Smooth Cylinder

CAT.ES20-178 A Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1 Smooth Cylinder CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 RE A B Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure REC CX 0.04 Minimum operating pressure MPa CY 12 16 0.03 MQQ M 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

IDG

75/25 110/40 170/57 240/80 300/100 Note) In the case of two or more options, indicate them alphabetically.

Air Slide Table Series MXS

80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the table displacement when the static moment load is applied to the table.

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

100

90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction

LG1H

780 880 1080 560 660 760 860 1060 700 800 900 1000 1200 60 160 260 360 460 80 180 280 380 480 Dimensions inside ( ) are for a 100 mm stroke.

Hydraulic Cylinders

Hydraulic Cylinder Series CH2E Pg. 87 Pg. 55 Bore sizes (mm) 3.5MPa 3.5MPa Nominal pressure Nominal pressure 40, 50, 63, 80, 100, 125, 160 32, 40, 50, 63, 80, 100 Bore sizes (mm) Tie-rod Type Features 2 JIS Standard Compact Hydraulic Cylinder Series CH KDB 20, 25, 32, 40, 50, 63, 80, 100 10MPa How to Order 32 30 CHKDB 32 30 Z73 CHDKDB With Auto Switch Number of auto switches With auto switch

Industrial Filters

(3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 500 24 330 131 620 450 270 720 1055 1455 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 750 24 380 173 620 450 270 720 1315 1715 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 1000 24

MXS

-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static yaw

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

XL

16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

AC Servo Motor Driver (Pulse input type/Positioning type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm2] Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 28 11.

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

High Vacuum Angle Valve, XL Series

16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50