Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

Single Axis Electric Actuator Serriies LJ1S Slider Guide

D-Y7GL Motor model Compatible driver model Power supply voltage (VAC) Motor output (W) + Brown lead wire MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 100/115 Main circuit of switch MSM022P1A 200 Output Black lead wire MSD023P1E 200/230 MR-C20A1 100/115 Mitsubishi Electric Corporation HC-PQ23 200 MR-C20A 200/230 SGDE-02BP 100/115 200 SGME-02BF12 Yaskawa Electric Corporation

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

40 to +80C 25 to +60C 40 to +80C Cable 25 to +60C 40 to +80C 25 to +60C 40 to +80C Min. bending radius (Fixed) 40 mm 21.7 mm 40 mm 21.7 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Brass (Nickel plating) Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) Phosphor

CL

K ML1C 25, 50, 75, 100, 125, 150, 200 201 to 350 D25 32 40 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 -X Intermediate stroke is available, too. 20Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

MHZ

(N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa 80 0.5 MPa 0.5 MPa 60 0.4 MPa 0.3 MPa 0.4 MPa 0.3 MPa 40 0.2 MPa 0.2 MPa

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

HRX-OM-W060

/300-A-20 CH2 3 2.5 Ambienttemperature 45 or less 2 Cooling capacity[kW] 1.5 Up to1.5kW)* Rated heat load 1.0kW 1 Up to 1.5kW.However,when 0.5 1.5kW heat load is applied,the cooling capacity of CH1 will decrease by 0.5kW. 0 20 25 30 35 40 Circulating fluid temperature[] Fig. 8-8 Cooling Capacity (HRL100/200/300-A-20) 8.4 Cooling Capacity HRL Series 8-8 HRX-OM-W060 Chapter 8 Documents 8.5

Air Slide Table Series MXQ

100 200 300 150 150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150

3

CK1 CLK2 CLKG Graph (1) Graph (2) 4 6 101 CKQ CLKQ MK50 200 MK63 Note) CK CLK 2 MK32,40 MK50, 63 4 6 102 CKQ 100 MK20,25 MK32, 40 80 Moment of inertia [kgm2] MK16 2 MK20, 25 Arm length [mm] 4 6 103 60 40 MK12 2 MK12, 16 4 6 104 MK63 Note) 20 2 Operating range Operating range 4 6 105 10 2 50 0 100 82 150 200 0.45 0.55 0.2 0.4 0.6 0.1 1 Maximum piston speed Note) [mm/s] Operating pressure [

CNS

700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port thread type Courtesy

Micro Mechanical Valve Series VM1000

Panel mounting hole 30.5 40 T.T. 0.8 to 7.5 31 29.1 Symbol 2 port 3 1.5 1.5 (A) 2 R port (3 port only) 12 10 1 (P) (112.1) 3 port (A) 2 52 (81.1) 12 10 1 (P) 3 (R) 13 22 32 16 30 25 2 x 1/4 2 x 5.5 mounting hole 40 * 0.5 MPa supply F .O.F .* 52 N T.T. 5.8 mm 22 Series VM100/200 Specific Product Precautions 1 Be sure to read before handling.

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

LEH_C

120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2 (3m LEC-T1-3JG* (LEC ) 6.

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Hydraulic

x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1 -0.4 D +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20 x 1.5 31 20 C +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M24 x 1.5 40 30 C-series K B +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M30 x 1.5 50 30 A +0.1 0 50 40 M8 x 1.25 185 145 57 79 M39 x 1.5 63 40 Double knuckle joint Material:

V

~120PSI 40~120 PSI Temperature Specification + -3%F.S.