Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

IDG

Construction Refer to pages 14-19-30 to 31.

Series AK1000

in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

ISO Standard Hydraulic Cylinder

CHQ (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 20 65 95 85 80 75 CHK (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9V/M9WV 20 + 30 65 + 30 75 + 30 80 + 30 85 + 30 95 + 30 "n" pcs.

•

I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

Compact

mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1 0.10 ST 15, 20 ST 15, 20 0.15 0.10 ST 5, 10 0.05 0.05 ST 5, 10 ST 5, 10 0.05 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.00 0 10 20 30 40 Load [N] Load [N] Load [N] MXZ25 MXZ25 MXZ25 0.25 0.40 0.25 ST 45, 50 ST 35, 40 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

(F: Thrust of one finger) 50 50 Pressure 0.6MPa MHS Pressure 0.6MPa 40 40 Holding force (N) 0.5MPa 0.5MPa Holding force (N) 30 30 0.4MPa 0.4MPa MHC2 0.3MPa 0.3MPa 20 20 MHT2 0.2MPa 0.2MPa 10 10 MHY2 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 MHW2 Holding point L (mm) Holding point L (mm) MRHQ MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 F F Auto switch 80 80 Pressure 0.6MPa 0.6MPa Pressure 70 70

C95

RT T V VA VB 4 4 5 9 11.5 17 164 182 195 224 259 289 260 290 333 362 431 471 6 6.5 8 8 10 10 37 41.5 47.5 55 61 68 4 4 5 5 5 5 4 4 6 6 8 8 4 4 4 4 4 4 17 19 24 24 30 30 6.5 9 10.5 12 14 15 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 13 14 15.5 16.5 19 19 6.5 8 9 8.5 10.5 10.5 32 40 50 63 80 100 26 30 37 37 46 51 34 39.5 47 55.5 61.5 69.5 15 17 24 24 30 32 10 13 16 16 21

VDW Series

Series 20 Port size Symbol 10 30 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size Orifice size mm 1 1.6 1.6 2.3 3.2 2 3 4 Series Symbol 1 2 1 2 3 2 3 4 10 20 30 3 Compact Direct Operated Series VDW10/20/30 2 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 10mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 10mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

VDW

Series 20 Port size Symbol 10 30 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size Orifice size (mm ) Series Symbol 1 1.6 1.6 2.3 3.2 2 3 4 1 2 1 2 3 2 3 4 10 20 30 17-2-64 5 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve For Water and Air Standard Specifications Valve construction Direct operated poppet Fluid (2) Water (except waste water or agricultural

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Series 20 Port size Symbol 10 30 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size Orifice size mm 1 1.6 1.6 2.3 3.2 2 3 4 Series Symbol 1 2 1 2 3 2 3 4 10 20 30 3 Compact Direct Operated Series VDW10/20/30 2 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural

VS 8-2/VS 8-4

EVS1001-9-2H Gasket 1 AXT632-25-15 (M4 x 30, with washer, nickel plated) Hexagon bolt 2 EVS1001-9-1 Light cover 3 29.5 x 1.2 O-ring 4 OR-0500-130-H O-ring 5 30 Exploded View of Manifold Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit EX250 EX600 EX500 EX126 S kit q r e w t @0 i u y @2 !8 o @1 !0 !9 !