Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Air Cylinder Series MB

26 M10 x 1.5 5 10 38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 100 69.5 341 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With Rod Boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150

ZP

M3 x 0.5 M5 x 0.8 Vacuum entry 6 Nylon tube 6 Urethane tube 4 tube 6 tube 10 to 32 M5 x 0.8 6 Nylon tube 6 Urethane tube 6 tube 8 tube M5 x 0.8 Rc 40, 50 1 8 2 to 8 10 to 32 40, 50 M8 x 1 Male thread M10 x 1 Male thread M14 x 1 Male thread Connection Buffer type Rotating (J)/Non-rotating (K) For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer

24

[kg] Load mass m [kg] 63 63 MGPW 50, 63 50 50 50, 63 MGQ 50, 63 40 40 40 MGG 10 10 50, 63 40 40 40 MGC 32 32 32 32 32 32 MGF 5 10 30 50 51 100 101 300 200 5 10 30 50 51 100 101 300 200 MGZ Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 MGT 50 50 100 100 100 80 80 80 100 100 Load mass m [kg] Load mass m [kg] 80 100 80 10 10 80 D5 10 100 29 30 50 51 300 200 5 10 100

ISO Cylinder

(n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C D-M9lV D-F7lV D-J79C

MGP

12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

5 Port Solenoid Valve Series SY3000/5000/7000/9000

/60Hz 110V 50/60Hz 200V 50/60Hz 220V 50/60Hz Single Double Closed center Exhaust center Pressure center C[dm 3/(sbar)] Series 4/2 5/3 (A/B EA/EB) { } P.362 10-SY320 0.65 Body ported Base mounted Body ported Base mounted 10-SY520 2.4 10-SY720 3.3 10-SY920 8.6 P.378 10-SY340 1.1 10-SY540 2.8 A B 10-SY740 4.5 PE 10-SY940 10 Manual override A, B port size Valve option P, EA, EB port size Bracket

Mechanically Jointed Rodless Cylinder Series MY1

Stroke Range Series Bore size (mm) Standard stroke (mm) Long stroke (mm) Series Bore size (mm) Standard stroke (mm) Long stroke (mm) 2001 to 5000 (Up to 3000 for 10, 16) 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 10, 20, 30, 40, 50 MY1B 100 to 2000 75, 100, 125, 150 10, 15 CXSW MY1M(W) 100 to 2000 2001 to 5000 (3000 for 16 only, 3000 for MY1MW) 16, 20, 25, 32, 40, 50, 63 10, 20, 30, 40, 50,

MG

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

1

XB9 Low speed cylinder Specifications Piston speed 10 to 50 mm/s (Series CY1 is ranged between 15 and 50 mm/s.)

Air Cylinder

301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32

Magnetically Coupled Rodless Cylinder

driving force Fn (N) 50 500 40 30 20 300 200 100 10 Usable range Usable range 5 20 30 40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range

4/5 Port Solenoid Valve

AC 220V Hz 50 60 / 50 60 / + 50 60 / P.537 50 60 / Non-locking push type 10-SYJ3000 3 position Closed center Exhaust center Pressure center 0.46 4/25/3 (A/BEA/EB) } Push-turn locking slotted type For AC Note) P.494 DIN terminal With light/surge voltage suppresser 10-SYJ5000 0.83 4/25/3 (A/BEA/EB) Push-turn locking lever type } (10-SYJ5000/7000 only) P.515 M8 connector 10-SYJ7000 2.9

Air Cylinder Series CA2

size (mm) AL B B1 C D E F G H1 J K KA LD LH LS LT LX LY A MQ 40 50 63 80 100 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 42 70 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 50 80 RHC 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 59 93 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 76 116 RZQ 40 37 116 41 92 30 52 14 21 16 M12

NCG/CG1

40 50 63 20 25 32 40 50 63 12 6 6 6 8 10 10 77 77 79 87 102 102 24.2 114 12 12 12 12 13 13 13 13 13 16 20 20 0.25 stroke (13) (22.5) 10(12) 26.7 119 (13) (25) 10(12) 30.2 121 (13) (25) 10(12) 34.6 139 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

MY1

Do not use a shock absorber and air cushion together. 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 m2, m3 max. m1 max. m2 max. m3 max. m1 max.