Clamp Cylinder with Lock

20 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Electric Actuator Triple Axis P&P Unit

be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 4) When the cover needs to be removed such as in the case of belt maintenance, secure work space of 40 mm or more. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

Parallel Style Air Gripper Series MHZ

0.4 MPa 0.4 MPa 30 MHC 200 0.3 MPa 0.3 MPa 20 150 0.2 MPa MHT 0.2 MPa 100 10 50 MHY 0 10 20 30 40 50 60 0 50 100 150 200 MHW Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D -X Pressure 0.7 MPa 60 MRHQ 0.6 MPa 50 Gripping force (N) 0.5 MPa MA 40 0.4 MPa 30 D0.3 MPa 0.2 MPa 20 10 0 20 40 60 80 Gripping point L (mm) 377 Series MHZ Model Selection Effective Gripping Force: Series

MHZ

20 150 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 10 50 0 10 20 30 40 50 60 0 50 100 150 200 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 20 10 0 20 40 60 80 Gripping point L (mm) 12-2-5 5 Series MHZ Model Selection Effective Gripping

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

0.4

or less Rubber seal 0.25 0.30 1.0 0.21 0.20 0.85 15 or less 34 or less VQ1200 13 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.70 10 or less 13 or less Double VQ1201 20 or less Rubber seal 0.25 0.30 1.0 0.21 0.20 0.85 15 or less 20 or less VQ1300 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.68 20 or less 40 or less Closed center VQ1301 33 or less Rubber seal 0.18 0.42 0.65 0.16 0.20

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

JXCx-OMT0023

50 20 50 7 20 8.

Thermo-chiller

Polyester band Forklift insertion side Cardboard box 800 mm Less than 150 mm 300 mm or more or more Wooden skid Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRLE050-A-20 150 Height 1320 x Width 580 x Depth 1240 HRLE050-W-20 143 HRLE090-A-20/40 176 HRLE090-W-20/40 170 300 mm or more 500 mm or more 2. Transporting with forklift 1.

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Pin Clamp Cylinders

198 19.9 199 20.0 200 19.5 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 D11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3 -X 533 C(L)KQG32 Series Dimensions CLKQGl32 (Clamping height LOW type) The figures below indicate the CLKQGB32-lRCL-X2081.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RHC MK(2) Minimum Operating Pressure RS Q G Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 RS H A 0.02 0.01 RZQ Standard Stroke Replacement Parts: Seal Kit MI W S Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit no. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 CEP1 20 25 32 40 50

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RHC MK(2) Minimum Operating Pressure RS Q G Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 RS H A 0.02 0.01 RZQ Standard Stroke Replacement Parts: Seal Kit MI W S Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit no. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 CEP1 20 25 32 40 50

LEH_C

L H L H L H 15 - 1020 /2 713 3 () 30%(F.S.) 25%(F.S.) 20%(F.S.) LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less