3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

NCA1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Precautions Series CV Applicable series: CVM5, CVM3, MVGQ Light/Surge Voltage Suppressor Plug Connector Warning Warning 1.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

SMC Pneumatic Clean Series

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1.5 30 27 22.4 9 19 60 255 25 22 18 7 14 55 250 M16 x 1.5 0.025 0.064 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 22.4 9 19 60 280 M20 x 1.5 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 28 11 24 70 327.5 M24 x 1.5 0.030 0.076 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 35.5 13 30 80 367.5 M30 x 1.5 0.030 0.076 0.036 0.090 100 100 80 65 M48 x 1.5 75

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 185.5 198 210.5 210.5 223 223 235.5 248 248 260.5 260.5 273 285.5 285.5 123 135.5 135.5 148 148 160.5 173 173 185.5 112.5 125 125 137.5 137.5 150 162.5 162.5 175 175 187.5 200 200 212.5 212.5 225 237.5 237.5 250 250

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin

MXW Series Long Stroke Slide Table

1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 52.5 31.5 27.5 27.5 27.5 27.5 B 79.5

Compressed Air Cleaning Filter Series

Dimensions Dimensions 60 (500) 45 (41) B 0.1 0.15 .05 0.2 MPa SMC IN OUT IN OUT A A Drain (mm) (mm) AFF series Size AM, AMD, AMH series Size 150C 250C 350C 450C 550C 650 850 AFF series Size AM, AMD, AMH series Size 650 850 Port size A Port size A B 352 501 37B 75B 1, 1 1 , 2 2C 4C 8C 11C 22C 37B 75B 239 252 284 80 80 80 80 305 339 80 391 80 541 80 1 2 1/4, 3/8 1/8, 1/4 1 2 3/8, 1/2 1/2, 3

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. 3.5 H ZZ + Stroke (mm) P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 ZZ H H2 H1 B2 B1 80 80 82 108 KA FL 10.5 10.5 10.5 13.5 A 20 25 32 40 GB 6 8 10 12 GA 8 8 8 11 AL 18 22 22 24 D 15.5 19.5 19.5 21 WA 31 31 31 36 E 8 10 12 14

240

0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 200 200 250 250 160 160 Me 200 200 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 120 120 m L3 150 150 Z 80 80 100 100 40 40 50 50 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4

Compact and Lightweight

ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 250 100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum