High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

Refrigerated Air Dryers

VAC (50 Hz), 100/110 VAC (60 Hz) *5 Single-phase: 200 VAC (50 Hz), 200/220 VAC (60 Hz) Auto drain Single-phase 100 V 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 Single-phase 200 V Power consumption 50/60 Hz *6 [W] Electric specifications Single-phase 100 V 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 Refrigerant R407C (HFC) IDF F Operating current

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

AC Servo Motor Driver

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 12 26 12.

IDX-OM-V024

Coefficient factors Inlet air temperature oF 80 90 100 110 120 130 140 149 oC 27 32 37.8 43 49 54 60 65 IDFB60 / IDFB70 1.33 1.21 1.00 0.78 0.61 0.48 0.38 0.28 IDFB80 / IDFB90 1.38 1.38 1.00 0.83 0.63 0.50 0.45 0.37 Inlet air pressure psi 50 60 70 80 90 100 120 140 145~232 MPa 0.35 0.41 0.48 0.55 0.62 0.69 0.83 0.97 1.00~1.60 IDFB60 / IDFB70 0.71 0.77 0.82 0.87 0.93 1.00 1.09 1.20 1.22 IDFB80

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

Rotary Table

On size 70, 100 and 200 the bearing cannot be removed as the bearing is press-fitted.

Water-cooledThermo-chiller

) 5 25 4 20 HRW015-H 3 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 15 2 HRW008-H 10 1 5 HRW002-H 0 10 20 30 40 50 60 70 80 90 0 0 10 20 30 40 50 60 70 80 Temperature difference t (C) (Circulating fluid temperature Facility water temperature) Circulating fluid temperature (C) When pump inverter is operating at frequency of 60 Hz (maximum).

A

Y40T 40 22 9 4 50 7 14 4.5 50 80 Y50T 40 22 9 4 50 7 14 4.5 50 80 Y60T 50 24 12 4 70 10 15 6 62.5 100 Courtesy of Steven Engineering, Inc. !

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

JXCx-OMX0009

Movement Speed Acceleration Deceleration force LV force position speed [mm/s2] [mm/s2] mode [mm/s] [mm] [mm] [mm] [%] [%] [mm/s] [%] [mm] 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 62 - Step Data

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Parallel Style Air Gripper Series MHZ

Pressure 0.7 MPa 25 Pressure 0.7 MPa 250 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 20 0.5 MPa 0.5 MPa 200 0.4 MPa 0.4 MPa 15 150 0.3 MPa 0.3 MPa 10 L 100 0.2 MPa 0.2 MPa 5 50 0 10 20 30 40 50 60 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHZ2-40D 500 70 Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 400 0.6 MPa Gripping force (N) 50 0.5 MPa

MHZ

100 150 Misc.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MGP

5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !