17

st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less WA Bore size (mm) X YY YL Z PA PB PW R S T U VA VB Q 25 st or less Over 300 st Over 200 st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less 28 11 14.5 25.5 74 89 52 64 174 210 75 90 198 236 156 188 180 210 140 166 28 48 52 72 128 148 200 220 300 320 42 35 54 47 92 85 128 121 178 171 M12 x 1.75 100 124

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

HRX-OM-Q026

HRSH150/200-A: 2 pcs. are used per unit HRS-S0214 Dust-proof filter (Upper) 1 pc. HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-34A-, for 200/220 VAC.

HRX-OM-X010

Potential malfunction may occur if a rectified AC with voltage rise (dv/dt) at zero crossing exceeds 40V /200 sec. Always establish a connection to a ground for safety.

C95Series

lJlO 11 4 120 90 15 158 132 1 84 26 13.5 24 17 75 100 129 2S +

IP8001 Series

(Ex.b) Select (200) = dir when (Ex.a) Select (200) = dir when (420) = rAtE, (421) = 90.0, (420) = rAtE (421) = 90.0 (422) = 100.0 (423) = 100 (422) = 100.0 (423) = 0 100% 100% 90% 420=rAtE 440=oFF Stroke Stroke 420=rAtE 10% 440=oFF 0% 0% 0% 100% 0% 100% Input current Input current (4mA) (20mA) (4mA) (20mA) Fig. 26 No.IP8S-OM09 32 Operation setting: Set lower and upper limit based on actuator

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Short Stroke Electric Actuator Series LX

0.1 Speed (mm/s) 100 1.1 0.6 0.2 0.1 200 0.7 0.4 0.2 0.1 Refer to page 302 for acceleration time. 217

RSH/RS1H

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Rotary Cylinder Series MRQ

) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

RSH/RS1H

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

SV

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

Air Slide Table Series MXS

0.025 0.03 0.06 MXS2075 0.020 MXS2030 0.02 MXS2020 0.04 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 100 200 300 0 160 120 80 40 240 200 Load (N) Load (N) Load (N) 25 25 25 Lr=154 mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.035 MXS25-150 MXS25

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

AC Servo Motor Driver

At the setting of STA 20, STB 5000 and STC 200, the actual arc part times are as follows. (Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].