Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

SZ3000

150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 2 148 137.5 118.5 15 3 160.5 150 129 16 4 173 162.5 139.5 17 5 185.5 175 150 18 6 185.5 175 160.5 12.5 7 198 187.5 171 13.5 8 210.5 200 181.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 26 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Serial Transmission Type SS5Z3-60S DB Stations Scale: 37% [With external pilot] 2-One-touch fitting (X,PE ports

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 20 20 10 10

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

ZP

100 250 150 200 60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration

K35-OMW0030

Cylinder stroke 200 200 mm 250 250 mm 300 300 mm 350 350 mm 450 450 mm 530 530 mm 15 (6) Rod boot Part number Bore size Stroke (mm) (mm) Silicone rubber material Nylon tarpaulin 125 200 C96A2G-1461V-R C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1

Air Slide Table Series MXQ

300 150 150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

7

, 150, 200 Note) A knuckle pin, cotter pins and flat washers are provided as a standard for Y and YA.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Digital Gap Checker ( compatible)

The graphs below show the variation of the distance for the product to turn ON, for 3 types of gap, by changing the supply pressure (50 kPa) when the product is set to turn ON at 150 kPa supply pressure. Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube Test conditions G, H type: 6 x 4 tube Reference pressure: 150 kPa : Use within the rated pressure range (100 kPa to 200 kPa).

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

Digital Gap Checker

mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch

Industrial Filters

240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/

Mechanically Jointed Rodless Cylinder Series MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

LJ1H

VAC For single phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

Air Catch Sensor Series ISA

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 0.6 0.4 0.5 mm 0.5 0.25 mm Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4