5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature. (Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36 38 45 56 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38

CJ5-S

, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Air cylinder

switches (Different side, Same side) 60 70 75 D-Y69 55 D-Y7PV D-Y7WV 55+30(n4)/2 n=4, 8, 12, 16 Other qty. 60+30(n4)/2 n=4, 8, 12, 16 70+30(n4)/2 n=4, 8, 12, 16 75+30(n4)/2 n=4, 8, 12, 16 1 switch, 2 switches (Different side, Same side) 85 100 105 110 90 D-Y7BA 90+45(n4)/2 n=4, 8, 12, 16 Other qty. 85+45(n4)/2 n=4, 8, 12, 16 100+45(n4)/2 n=4, 8, 12, 16 105+45(n4)/2 n=4, 8, 12, 16 110+45(n4

ITV

100 0 25 50 75 100 Input signal [% F.S.]

90

56.8 67.5 62.5 73 45 60 71.8 82.5 75 85.5 60 75 86.8 97.5 87.5 98 75 90 101.8 112.5 112.5 123 90 105 116.8 127.5 125 135.5 105 120 131.8 142.5 137.5 148 120 135 146.8 157.5 150 160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Smooth Cylinder

, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Modular Type Filter Regulator Series AW

Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27

Shock Absorbers and Rate Controls

UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l? ul .75 L98 2.257.50 [/A 1.503.75NlA r{/A Pl 2t 50tt t, -2, .3 t7.9i18.62 2.48{ln 2Y2'12 UN .75 2.38 2.38 9.50 N/A t.50 4.15 N/A N/A All dimensions in nches. Sh*ck Absorbens Non-Adjustable Hydraulic Series qigfE.

Integrated Controller

Size Non-rotating accuracy 16 1.1 25 0.8 32 0.7 + Force Conversion Graph (Guide) EQY32 EQY16 800 700 600 500 400 300 200 100 0 160 Lead 4: EQY32C Lead 2.5: EQY16C 140 120 Lead 8: EQY32B Lead 5: EQY16B Force [N] Force [N] 100 Lead 16: EQY32A Lead 10: EQY16A 80 Lead 24: EQY32H 60 40 Min. 25% Max. 45% 20 Min. 30% Max. 70% 0 15 20 25 30 35 40 50 45 10 20 30 40 50 90 70 80 60 Pushing force set

XL

SMC specified parts should be used for service parts. 45 Series XL Specific Product Precautions 5 Be sure to read before handling.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L

Cylinder with Lock Series CLS

20 40 80 40 18.5 130 74 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 J K KA L M MM N P RR S U W H Z ZZ M14 x 1.5 15 31 65 19 M30 x 1.5 35 1/2 29 98 35 110 383 412 to 1000 M14 x 1.5 15 31 75 19 M30 x 1.5 35 1/2 32 98 40 8 110 393 425 to 1000 M16 x 1.5 17 36 80 22 M36 x 1.5 39 3/4 36 106 45 9 120 438 474 to 1200 With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160

MXF

36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E Stroke Model Stroke A 100 30 50 75 20 10 100 75 50 30 20 10 8 (5.5) 11.1 (8.6) 13.8 (11.3) 18.7 (16.2) 8 (5.5) 3 (0.5) 11.1 (8.6) MXF8 9.5 10 5 10 27.1 (24.6) 23.8

High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber

CG5-S

, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.