Compact Rotary Actuator Series CRQ2

MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Digital Flow Switch

OUT1 over current error The switch output (OUT1) load current has exceeded 80 mA. Turn the power OFF and remove the cause of the over current. Then turn the power ON again. OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. An internal data error has occurred. Turn the power OFF and turn it ON again.

MGC

84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000 40 2000 Made to Order Specifications (For details, refer to page 6-17-1.)

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Electric Actuators

to 30 5 phase 242 to 30 294 2 phase 228 to 80 5 phase 244 to 80 2 phase 284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase

air-filter-e

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

NCA1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Precautions Series CV Applicable series: CVM5, CVM3, MVGQ Light/Surge Voltage Suppressor Plug Connector Warning Warning 1.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

SMC Pneumatic Clean Series

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1.5 30 27 22.4 9 19 60 255 25 22 18 7 14 55 250 M16 x 1.5 0.025 0.064 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 22.4 9 19 60 280 M20 x 1.5 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 28 11 24 70 327.5 M24 x 1.5 0.030 0.076 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 35.5 13 30 80 367.5 M30 x 1.5 0.030 0.076 0.036 0.090 100 100 80 65 M48 x 1.5 75

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 185.5 198 210.5 210.5 223 223 235.5 248 248 260.5 260.5 273 285.5 285.5 123 135.5 135.5 148 148 160.5 173 173 185.5 112.5 125 125 137.5 137.5 150 162.5 162.5 175 175 187.5 200 200 212.5 212.5 225 237.5 237.5 250 250

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin