Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQP2 Double acting 7-6-88 Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 Spring extend CQP2 7-6-98 Large Bore Size 125, 140 160, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S

LEKF-OMZ0035

32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8 10 AC servo motor LECSC2-T7 T7 200 32 Absolute encoder LECSN2-T7Stroke LECSS2-T7 50 50 LECSB2-T8 to to LECSC2-T8 T8 400 40

MNB

1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 32 50 40 Load weight: m(kg) Load weight: m(kg) 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

High Power Cylinder Series RHC

14.5 18 200 to 700 20 19.5 8 6 28 7 5.5 25.5 39 31 48 49.5 56.5 16 18 22 12 200 to 700 25 19.5 9 6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200 to 1000 40 MM LZ LY LX LT S NN ND NF NE P NB ZZ LS NA Y N WH X Bore size (mm) 55 41 40 5.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 22 20 232 M8 x 1.25 192 1/4 20 55 46.5 40 5.5 M24

Electric Actuator Triple Axis P&P Unit

15 1600 30 30 15 1600 kg mm/s mm 2000 250 500 1000 250 500 (1475) 1000 0.05 When axes are combined, select each axis considering the weight of the work piece and the body. 100 200 300 400 500 600 700 800 Stroke mm 900 1000 Z axis specifications 200 5 10 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 5 10 20 32 20 32 High rigidity direct acting guide 7.5

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Vertical Mount) For transfer load of 0kg For transfer load of 5kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 150 50 10 1 100 200 50 10 1 10 10 10.1 15.1 5.1 1.1 0.2 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 7.6 2.6 0.6 0.1 5.1 7.6 2.6 0.6 0.1 30 30 3.4 5.1 1.7 0.4 0.1 3.4 5.1 1.7 0.4 0.1

Series AK1000

psig (0.14 MPa) AK1500 3000 psig (20.7 MPa) 200 psig (1.4 MPa) Inlet pressure: 50 0.34 100 0.69 90 0.62 40 0.28 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 30 0.21 60 0.41 50 0.34 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Support Guide/11-LEFG Series

30 40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Magnetically Coupled Rodless Cylinder

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

The materials in parentheses are the seal materials. 20 21 Series VX21/22/23 Construction: Manifold Normally closed (N.C.) Normally open (N.O.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

HRX-OM-Y098

/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.749 1.32 0.437 150 (1 1/2") 3/4-16 0.25 1.25 0.75 0.38 0.09 1.50 0.88 1.25 3.82 0.25 1/8 NPTF 3.69 7/16-20 0.749 1.56 0.437 200 (2") 1 1/4-12 0.31 1.75 0.88 0.50 0.12 1.19 1.19 1.75 4.95 0.38 1/4 NPTF 4.69 1/2-20 1.374 2.06 0.625 Double acting, single rod Double end mounting: NC(D)ME G dia. pivot pin hole Note) B dia. pilot B dia. pilot MM dia (in) KK UNF-2A D across flats NN mounting